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Abstract
In the present study, the hybrid differential transformation and finite difference method is applied to analyze the dynamic behavior of the nonlinear micro-electromechanical circular plate actuated by combined DC/AC loading schemes. The analysis takes account of the axial residual stress and hydrostatic pressure acting on micro circular plate upper surface. The dynamic response of the plate as a function of the magnitude of the AC driving voltage is explored. Moreover, the effect of the initial gap height on the pull-in voltage of the plate is systematically explored.