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Critical Reviews in Solid State and Materials Sciences Volume 28, 2003 - Issue 4
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Original Articles

High-κ Dielectric Materials for Microelectronics

Robert M. Wallace Departments of Electrical Engineering and Physics, P.O. Box 830688, EC33, University of Texas at Dallas, Richardson, Texas 75083
&
Glen D. Wilk ASM America, 3440 E. University Drive, Phoenix, Arizona 85034
Pages 231-285 | Published online: 24 Jun 2010
 
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Abstract

This article reviews the current status of high-κ dielectric materials for microelectronics. In particular, recent work impacting the integration of these high-κ materials for gate dielectric and capacitor applications in advanced scaled microelectronic devices is reviewed.

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