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Integrated Ferroelectrics
An International Journal
Volume 59, 2003 - Issue 1
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Original Articles

Influence of Post-Annealing on the Characteristics of Pb(Zr,Ti)O3 Thin Films Deposited by Liquid Delivery MOCVD Using a Cocktail Solution

Yohei Otani Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
,
Norikazu Abe Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
,
Soichiro Okamura Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
&
Tadashi Shiosaki Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
Pages 1475-1482 | Published online: 18 Jun 2010
 
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Abstract

Ferroelectric PZT thin films were deposited by liquid delivery MOCVD using a cocktail solution. The cocktail solution consisted of Pb(METHD)2, Zr(METHD)4 and Ti(MPD)(METHD)2 diluted with ethylcyclohexane. The films deposited on Pt/Ti/SiO2/Si at a substrate temperature of 500°C consisted of PZT, PbO and PbPtx, and showed poor properties. However, after annealing at 450°C in air for thirty minutes, the PbPtx phase disappeared while the volume of the PbO phase increased. The hysteresis properties were also improved by annealing at 450°C. After annealing at 600°C in air for thirty minutes, the PbPtx and the PbO phases disappeared perfectly and the PZT thin films showed good hysteresis properties with the remanent polarization of 30 μC/cm2 and the coercive field of 88 kV/cm.

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