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Abstract
The mechanical properties of antimony doped SnO2 thin films have great importance due to the wide application of these materials. SnO2 coatings prepared by spray pyrolysis (SP) and chemical vapor deposition (CVD) on a glass substrate have been investigated by nanoindentation for mechanical characterization. The hardness of the layers was found to be dependent on the preparation method, and the adhesion of the layer has an important role in the overall mechanical properties of the coating: the CVD layer adheres much better than the SP coating. The relaxation of nanoindentation impressions of both coatings shows a significantly larger relaxation than the substrate glass. A method was developed for resolving the spatial shape differences between the relaxed hardness indents and the ideal indenter pyramid. It provides a quantitative way to investigate the relaxation characteristic of different materials.
ACKNOWLEDGMENT
This work was supported by the Hungarian-Romanian intergovernmental scientific and technological cooperation project under contract number RO-19/2002, by OTKA under contract number T-037643, and by NKFP under contract number 3a0059/2002.