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Abstract
Extensive experimental results for various square spiral inductors on GaAs substrate are presented in this paper. Through detailed studies of the inductances extracted from the de-embedded on-chip measured S-parameters, the relationships between the electrical characteristics and the geometrical parameters of the spiral inductors are revealed. Based on the curve fitting technique, a behavioral model for spiral inductors is obtained and presented. Thus, the inductances of spiral inductors with an acceptable accuracy up to their first resonance frequencies are obtained.