Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

Y. Q. Wu School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

Z. X. Tang School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

Y. H. Xu School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

X. He School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

B. Zhang School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

Abstract

The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al₂O₃ is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (ε′_r and ε′′_r ) are less than 1%.

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Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

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Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

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