An Improved Measurement Configuration for Determining the Permeability of Ferromagnetic Thin Film Materials

Abstract

An improved measurement configuration is proposed to measure the permeability of ferromagnetic thin film materials. For best consideration of the large conductivity of ferromagnetic materials, the thin film is integrated as under layer substrate instead of upper layer substrate in microstrip configuration. Formulations are deduced and support vector regression (SVR) is used to extract the complex permeability of the ferromagnetic thin film materials. The results show that the error for both real part and imaginary part of the permeability (μ′ and μ″) is less than 1%.