Tribological properties of diamond-like carbon film with transition layer on a silicon surface

Abstract

The antiwear and friction-reducing properties of diamond-like carbon films with transition layer deposited at different time on monocrystalline silicon were investigated by UMT-2 micro wear and friction tester. The mechanical properties and surface morphology of the films were determined by nano mechanics tester, scanning electron microscopy, three-dimensional topography instrument and Raman spectrum. The result showed that the surface of the diamond-like carbon films was very smooth and should belong to the standard nanofilms. All the films have good antifriction and resistance to wear role. The resistance to wear effect of this compound film is better than that of the diamond-like carbon film without transition layer. The reason is that the transition layers combined diamond-like carbon film and substrate more firmly.

Keywords:

• Silicon
• DLC film
• Antiwear
• Friction coefficient