Microjoining with a scanning electron microscope

Abstract

In the present work the authors describe the adaptation of a standard SEM into a flexible microjoining tool. The system incorporates exceptional control of energy input and its location, environmental cleanliness, part manipulation and especially, part imaging. Beam energetics, modelling of thermal flow in a simple geometry, significant effects of surface energy on molten pools and beam size characterisation are treated. Examples of small to micro fusion welds and molten zones produced in a variety of materials (Ni, tool steel, Tophet C, Si) and sizes are given. Future directions are also suggested.

Keywords:

• MICROJOINING
• SEM
• BEAM POWER
• BEAM CHARACTERISATION
• LIGA
• MEMS