Surface morphology of LaNiO₃ thin films and its dependence on annealing temperature

Abstract

Conductive LaNiO₃ (LNO) thin films were prepared directly on Si substrates by the sol–gel method. The films were obtained by spin coating on Si substrate and then annealed at various temperatures in an ambient atmosphere. The dependence of surface morphology, crystallinity, orientation and conductive behaviour of the LNO films on the thermal treatment and annealing temperature has been studied. The results showed that the films annealed at 700°C presented a good surface morphology and possessed a strong (200) orientation. The resistivity and sheet resistance of the LNO films were 0·0187 Ω cm and 76 Ω ⁻¹ respectively. The Ba(Sr, Ti) oxide (BST) films deposited on LNO coated Si substrate showed lower leakage current compared with BST/Pt/Ti/SiO₂/Si multilayer films.

Keywords:

• LANIO3 THIN FILM
• SOL-GEL METHOD
• SURFACE MORPHOLOGY
• LEAKAGE CURRENT