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Abstract
Al doped ZnO (AZO) films were prepared on glass substrates by radio frequency (RF) magnetron sputtering technology. Surface morphology, crystal structure, chemical composition, UV-visible transmittance, electrical and infrared properties of the AZO films were investigated by atomic force microscopy, scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Spectrophotometer, Hall measurement system and Fourier Transform infrared spectroscopy, respectively. The results indicate that AZO films with strong c-axis preferred wurtzite structure were successfully prepared by RF magnetron sputtering at room temperature. The average visible transmittance and infrared reflection rate (from 1·5 to 25 μm) of the deposited films was 84·8 and 30%, respectively. The study creates a sound basis for investigating the infrared properties of AZO films for future heat shielding films.
Acknowledgements
The authors gratefully acknowledge the grant (Project No. ITP/012/11TP) from Hong Kong Innovation and Technology Commission, and Mr D. G. Miao would like to thank the Research Committee of The Hong Kong Polytechnic University for providing him a scholarship.