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Abstract
It is shown how the SEM equipped with a wavelength dispersive X-ray analyser may be used for the analysis of light elements in a range of metallurgical samples. The paper aims to help anyone wishing to set up a microprobe analyser for analysis and it describes the history, apparatus used, and the potential for the technique. Several practical analytical situations are explored that show how the technique may be applied to surface engineered components. The problems that can arise are illustrated and examples are given of the results that may be obtained.