Design and Development of X-band Planar Balun on Silicon

Abstract

This article presents the design and realization of an X-band (8.2 GHz) planar balun using microstrip technology. Further, various materials compatible to standard Complementary metal-oxide semiconductor (CMOS) process are analyzed, and the optimum process which is combination of plasma-enhanced chemical vapor deposition (PECVD) oxide and high-resistivity wafer is selected for better RF performance. The performance of the balun is optimized by electromagnetic analysis and realized on silicon substrate utilizing CMOS process. The measured results show close agreement with simulation having amplitude imbalance of ±0.35 dB (max.), return loss better than 14 dB (min.), and a maximum phase error of ±0.75° at the designed frequency.

Keywords:

• CMOS process
• Coupled filter
• High-resistive silicon
• Microstrip line
• Planar balun

Additional information

Notes on contributors

Kamaljeet Singh

Kamaljeet Singh FIETE, MIEEE has obtained M.Tech (Microwaves) from Delhi University in 1999 and PhD from Rajasthan University. He joined ISRO Satellite center, Bangalore in 1999 where he worked in the receiver division. From August 2006, he is working in MEMS area at SCL, Chandigarh. E-mail: [email protected]

Ayan Karmakar

Ayam Karmakar received the B.Tech degree in Electronics & Communication Engineering from West Bengal University of Technology (WBUT), Kolkata, India in 2005. In the year 2006, he joined ISRO as a Scientist. And, subsequently has been posted to SCL, Chandigarh in MEMS Development Division. His research interests include design & development of X-band and K-band passive microwave integrated circuits using silicon based MIC and RF-MEMS technology. E-mail: [email protected]

K. Nagachenchaiah

Nagachenchaiah (Distinguished Scientist) obtained his B.E in Electronics and Communication Engineering and M.Tech in Computation and Control Engineering from Andhra University and IIT Kharagpur respectively. He joined Space Applications Centre, Ahmedabad in 1974 and was involved in the design and development of various Optical infrared remote sensors for aircraft and spacecraft platforms, ground based instruments and sensor test facilities. He superannuated as Distinguished Scientist and Director, SCL. E-mail: [email protected]