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Materials Research Innovations Volume 4, 2001 - Issue 5-6
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Original Article

Effect of a bell-shaped cover in spin coating process on final film thickness

Michael PannekGKSS Research Centre, Max-Planck-Strasse, 21502Geesthacht, Germany
,
Thomas DunkelGKSS Research Centre, Max-Planck-Strasse, 21502Geesthacht, Germany
&
Dirk W. SchubertGKSS Research Centre, Max-Planck-Strasse, 21502Geesthacht, Germany
Pages 340-343 | Received 09 Oct 2000, Accepted 10 Oct 2000, Published online: 13 Oct 2016

Citations (7)

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Read on this site (2)

C.T. Pan & C.Y. Su. (2008) Study of micro-lens array by reflow process. Journal of Modern Optics 55:17, pages 2843-2856.
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Dirk W. Schubert & Thomas Dunkel. (2003) Spin coating from a molecular point of view: its concentration regimes, influence of molar mass and distribution. Materials Research Innovations 7:5, pages 314-321.
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Articles from other publishers (5)

Ze Liu, Jinkui Chu, Ran Zhang, Chuanlong Guan & Yuanyi Fan. (2022) Preparation of an Integrated Polarization Navigation Sensor via a Nanoimprint Photolithography Process. Photonics 9:11, pages 806.
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Suguru Shiratori & Toru Kubokawa. (2015) Double-peaked edge-bead in drying film of solvent-resin mixtures. Physics of Fluids 27:10.
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Karina Arcaute & Ryan B. Wicker. (2008) Patient-Specific Compliant Vessel Manufacturing Using Dip-Spin Coating of Rapid Prototyped Molds. Journal of Manufacturing Science and Engineering 130:5.
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Jonny Eriksson, Martin Malmsten, Fredrik Tiberg, Thomas Hønger Callisen, Ture Damhus & Katja S. Johansen. (2005) Enzymatic degradation of model cellulose films. Journal of Colloid and Interface Science 284:1, pages 99-106.
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H Clemens, D.W Schubert, G Dehm, C Scheu & J.L Buttstaedt. (2003) Characterization of biocompatible Ti(CNO) layers on polymeric substrates. Applied Surface Science 219:3-4, pages 329-337.
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