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Ferroelectrics Volume 408, 2010 - Issue 1
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SECTION J: PIEZOELECTRICS AND APPLICATIONS

Effect of Metal Buffer Layer on Surface Acoustic Wave in AlN/Diamond Structure

Chia-Chi Sung Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Section 4, Roosevelt Rd., Da-an District, Taipei County, Taiwan, Republic of China
,
Yuan-Feng Chiang Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Section 4, Roosevelt Rd., Da-an District, Taipei County, Taiwan, Republic of China
,
Ruyen Ro Department of Electrical Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd. Ta-Hsu Hsiang, Kaohsiung County, Taiwan
,
Ruyue Lee Department of Electrical Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd. Ta-Hsu Hsiang, Kaohsiung County, Taiwan
&
Sean Wu Department of Electronics Engineering and Computer Science, Tung-Fang Institute of Technology, 110, Tung-Fung Road, Hunei Shiang, Kaohsiung, Taiwan, Republic of China
Pages 25-31 | Received 23 Aug 2009, Accepted 08 Oct 2009, Published online: 01 Dec 2010

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Yixi Yang, Dong Zhou, Xiaomei Li, Chengtao Yang, Fan Feng, Junsong Yang & Qijun Hu. (2015) Parameter Optimization for Preparing c-Oriented ScAlN Thin Films. Integrated Ferroelectrics 167:1, pages 17-23.
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Articles from other publishers (1)

Changjian Zhou, Yi Yang, Hao Jin, Bin Feng, Shurong Dong, Jikui Luo, Tian-Ling Ren, Mansun Chan & Cary Y. Yang. (2013) Surface acoustic wave resonators based on (002)AlN/Pt/diamond/silicon layered structure. Thin Solid Films 548, pages 425-428.
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