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Ferroelectrics Volume 133, 1992 - Issue 1
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Section II: Invited papers

TfI14: Ferroelectric thin films for memory applications: Sol-gel processing and decomposition of organo-metallic compounds

Mareike Klee Philips GmbH Forschungs laboratorium Aachen, Aachen, Germany
&
Poul K. Larsen Philips Research Laboratories, P. O. Box 80.000, 5600, JA Eindhoven, The Netherlands
Pages 91-96 | Published online: 10 Feb 2011

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Ai-Li Ding, Wel-Gen Luo, Pingsun Qiu & Kwang Soo No. (1999) Optimum heat treatment condition for PZT thin films prepared by Sol-Gel. Ferroelectrics 232:1, pages 65-70.
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Haoshuang Gu, Peizhi Chen, Youhua Zhou, Min Zhao, Anxiang Kuang & Xingjiao Li. (1998) Reactions in preparing Bi4Ti3O12 ultrafine powders by sol-gel process. Ferroelectrics 211:1, pages 271-280.
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Mareike Klee & Uwe Mackens. (1996) Sol-gel and mod processing of layered perocskite films. Integrated Ferroelectrics 12:1, pages 11-22.
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M. Klee, A. de Veirman, D.J. Taylor & P.K. Larsen. (1994) Structure-property relations in polycrystalline titanate thin films. Integrated Ferroelectrics 4:3, pages 197-206.
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Articles from other publishers (17)

S. Madeswaran, N.V. Giridharan & R. Jayavel. (2003) Sol–gel synthesis and property studies of layered perovskite bismuth titanate thin films. Materials Chemistry and Physics 80:1, pages 23-28.
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Lin Shen, Dingquan Xiao, Ping Yu, Jianguo Zhu, Daojiang Gao, Guanglong Yu & Wen Zhang. (2003) Preparation by Sol-Gel Method and Characterizations of (Bi<SUB>4-x</SUB>La<SUB>x</SUB>)Ti<SUB>3</SUB>O<SUB>12</SUB> Thin Films. MATERIALS TRANSACTIONS 44:7, pages 1324-1327.
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N.V. Giridharan, S. Madeswaran & R. Jayavel. (2002) Structural, morphology and electrical studies on ferroelectric bismuth titanate thin films prepared by sol–gel technique. Journal of Crystal Growth 237-239, pages 468-472.
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V. Ya. Shur, E. B. Blankova, A. L. Subbotin, E. A. Borisova & A. V. Barannikov. (2001) Phase transformation kinetics induced in thin sol-gel PZT films under thermal annealing. Physics of the Solid State 43:5, pages 902-907.
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M. Klee, H. van Hal, W. Keur, W. Brand, R. Kiewitt, U. Mackens & C. Metzmacher. 2001. Handbook of Advanced Electronic and Photonic Materials and Devices. Handbook of Advanced Electronic and Photonic Materials and Devices 195 217 .
Hiroshi Funakubo, Kuniharu Nagashima, Kazuo Shinozaki & Nobuyasu Mizutani. (2000) Comparison of deposition behavior of Pb(Zr,Ti)O 3 films and its end-member-oxide films prepared by MOCVD. Thin Solid Films 368:2, pages 261-265.
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V.Ya Shur, E.B Blankova, A.L Subbotin, E.A Borisova, D.V Pelegov, S Hoffmann, D Bolten, R Gerhardt & R Waser. (1999) Influence of crystallization kinetics on texture of sol–gel PZT and BST thin films. Journal of the European Ceramic Society 19:6-7, pages 1391-1395.
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V. Ya. Shur, S. A. Negashev, A. L. Subbotin, D. V. Pelegov, E. A. Borisova, E. B. Blankova & S. Trolier-McKinstry. (1999) Evolution of the fractal surface of amorphous lead zirconate-titanate films during crystallization. Physics of the Solid State 41:2, pages 274-277.
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V.Ya. Shur, E.B. Blankova, A.L. Subbotin, E.A. Borisova, D. Bolten, R. Gerhardt & R. Waser. (2011) Crystallization Kinetics and Texture of Sol-Gel PZT Thin Films. MRS Proceedings 541.
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M. Klee & U. Mackens. (1995) Sol-gel and MOD processing of layered perovskite and SrTiO3 films. Microelectronic Engineering 29:1-4, pages 185-188.
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D. Sporn, S. Merklein, W. Grond, S. Seifert, S. Wahl & A. Berger. (1995) Sol-gel processing of perovskite thin films. Microelectronic Engineering 29:1-4, pages 161-168.
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Radosveta D. Klissurska, Keith G. Brooks, Ian M. Reaney, Czezlaw Pawlaczyk, Marija Kosec & Nava Setter. (2005) Effect of Nb Doping on the Microstructure of Sol—Gel‐Derived PZT Thin Films. Journal of the American Ceramic Society 78:6, pages 1513-1520.
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M. Klee, U. Mackens, J. Pankert, W. Brand & W. Klee. 1995. Science and Technology of Electroceramic Thin Films. Science and Technology of Electroceramic Thin Films 99 115 .
Keith G. Brooks, Ian M. Reaney, Radosveta Klissurska, Y. Huang, L. Bursill & N. Setter. (2011) Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates. Journal of Materials Research 9:10, pages 2540-2553.
Crossref
M.C. Jiang, T.B. Wu & J.M. Wu. (1994) Dielectric (Pb0.91 La0.09)(Mg0.25 Nb0.40 Ti0.35)O3 thin films on electrodes prepared by r.f. magnetron sputtering. Materials Chemistry and Physics 38:4, pages 369-376.
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M.C. Gust, L.A. Momoda & M.L. Mecartney. (2011) Microstructure and Crystallization Behavior of Sol-Gel Prepared BaTiO 3 Thin Films . MRS Proceedings 346.
Crossref
P.K. Larsen, G.L.M. Kampschoer, M.B. van der Mark & M. Klee. (1992) Ultrafast polarization switching of lead zirconate titanate thin films. Ultrafast polarization switching of lead zirconate titanate thin films.

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