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Original Articles

Evolution of surface relief during firing of PZT thin films

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Pages 67-72 | Received 09 Aug 1993, Published online: 25 Feb 2011

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EmilA. Kneer, DunbarP. Birnie$suffix/text()$suffix/text(), R.D. Schrimpf, J.C. Podlesny & G. Teowee. (1995) Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication. Integrated Ferroelectrics 7:1-4, pages 61-73.
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Articles from other publishers (6)

D.A. Golosov, J.E. Okojie, S.М. Zavadski, А.S. Rudenkov, S.N. Melnikov & V.V. Kolos. (2018) Stability of the platinum electrode during high temperature annealing. Thin Solid Films 661, pages 53-59.
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R.M. Tiggelaar, R.G.P. Sanders, A.W. Groenland & J.G.E. Gardeniers. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and Actuators A: Physical 152:1, pages 39-47.
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L.M.R Eakins, B.W Olson, C.D Richards, R.F Richards & D.F Bahr. (2003) Microstructural characterization and mechanical reliability of interfaces in piezoelectric based microelectromechanical systems. Thin Solid Films 441:1-2, pages 180-186.
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S. T. Tay, C. H. A. Huan, A. T. S. Wee, R. Liu, W. C. Goh, C. K. Ong & G. S. Chen. (2002) Substrate temperature studies of SrBi2(Ta1−xNbx)2O9 grown by pulsed laser ablation deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20:1, pages 125-131.
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Dage Liu, Chen Wang, Hongxi Zhang, Junwei Li, Liancheng Zhao & Chunli Bai. (2001) Domain configuration and interface structure analysis of sol-gel-derived PZT ferroelectric thin films. Surface and Interface Analysis 32:1, pages 27-31.
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E.A. Kneer, D.P. Birnie, G. Teowee & J.C. Podlesny. (1994) Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors.

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