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Section B

Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching

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Pages 124-134 | Received 18 Oct 2012, Accepted 29 Apr 2013, Published online: 04 Jun 2013

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Matthias Ehrhardt, Lucas Jódar Sánchez & Rafael Jacinto Villanueva Micó. (2014) Advanced computational engineering. International Journal of Computer Mathematics 91:1, pages 1-3.
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Xinjia Zhao, Meng Zhao, Jing Ji, Chengbao Lv & Shuanqiang Song. (2023) 2D Analysis and simulation of quartz crystal etch penetration by revisiting a previous geometric method. Sensors and Actuators A: Physical, pages 114901.
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C Montoliu, E Baer, J Cerd?R J Colom. (2015) Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set method. Journal of Micromechanics and Microengineering 25:6, pages 065013.
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