Citations (33)
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Articles from other publishers (18)
Haiyan Wang, Tianhong Pan & Guochu Chen. (2023) Discrete Active Disturbance Rejection Control for Semiconductor Manufacturing Processes With Dynamic Models. IEEE Transactions on Semiconductor Manufacturing 36:4, pages 636-644.
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Sinyoung Kim, Jaeyeon Jang & Chang Ouk Kim. (2020) A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks. Journal of Intelligent Manufacturing 32:8, pages 2267-2280.
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Weichin Chien & Lingyen Yeh. (2020) Optimization of Online Double Exponentially Weighted Moving Average Controller in a Multiple Inputs Single Output System. Optimization of Online Double Exponentially Weighted Moving Average Controller in a Multiple Inputs Single Output System.
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Chao-Ton Su & Chun-Chin Hsu. (2004) A time-varying weights tuning method of the double EWMA controller. Omega 32:6, pages 473-480.
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