167
Views
37
CrossRef citations to date
0
Altmetric
Original Articles

Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing

, &
Pages 3501-3527 | Received 06 Jul 2004, Published online: 06 Aug 2010

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (10)

Jie Zhang & Xiaoxi Wang. (2016) Multi-agent-based hierarchical collaborative scheduling in re-entrant manufacturing systems. International Journal of Production Research 54:23, pages 7043-7059.
Read now
Hadi Mokhtari, Ashkan Mozdgir & Isa Nakhai Kamal Abadi. (2012) A reliability/availability approach to joint production and maintenance scheduling with multiple preventive maintenance services. International Journal of Production Research 50:20, pages 5906-5925.
Read now
Lin Danping & Carman K.M. Lee. (2011) A review of the research methodology for the re-entrant scheduling problem. International Journal of Production Research 49:8, pages 2221-2242.
Read now
Subhash C. Sarin, Amrusha Varadarajan & Lixin Wang. (2011) A survey of dispatching rules for operational control in wafer fabrication. Production Planning & Control 22:1, pages 4-24.
Read now
Vipul Jain, S. Wadhwa & S.G. Deshmukh. (2009) Select supplier-related issues in modelling a dynamic supply chain: potential, challenges and direction for future research. International Journal of Production Research 47:11, pages 3013-3039.
Read now
Vipul Jain, S. Wadhwa & S.G. Deshmukh. (2009) Revisiting information systems to support a dynamic supply chain: issues and perspectives. Production Planning & Control 20:1, pages 17-29.
Read now
C. Ou-Yang & Y. D. Lin. (2008) BPMN-based business process model feasibility analysis: a petri net approach. International Journal of Production Research 46:14, pages 3763-3781.
Read now
M. Stevenson , L. C. Hendry & B. G. Kingsman . (2005) A review of production planning and control: the applicability of key concepts to the make-to-order industry. International Journal of Production Research 43:5, pages 869-898.
Read now
Huiran Liu, Richard Y. K. Fung & Zhibin Jiang. (2005) Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets. International Journal of Production Research 43:3, pages 471-495.
Read now

Articles from other publishers (27)

Jiaxing Wang, Sibin Gao, Zhejun Tang, Dapeng Tan, Bin Cao & Jing Fan. (2021) A context-aware recommendation system for improving manufacturing process modeling. Journal of Intelligent Manufacturing 34:3, pages 1347-1368.
Crossref
Seung-Woo Jeon, Donggun Lee, Seog-Chan Oh, Kyu-Tae Park, Sang-Do Noh & Jorge Arinez. (2022) Design and Implementation of Simulation-Based Scheduling System with Reinforcement Learning for Re-Entrant Production Lines. Machines 10:12, pages 1169.
Crossref
Young Hoon Lee & Seunghoon Lee. (2022) Deep reinforcement learning based scheduling within production plan in semiconductor fabrication. Expert Systems with Applications 191, pages 116222.
Crossref
Fernando P Santos, Ângelo P Teixeira & C. Guedes Soares. (2018) Modeling, simulation and optimization of maintenance cost aspects on multi-unit systems by stochastic Petri nets with predicates. SIMULATION 95:5, pages 461-478.
Crossref
Chrissoleon T. Papadopoulos, Jingshan Li & Michael E.J. O'Kelly. (2019) A classification and review of timed Markov models of manufacturing systems. Computers & Industrial Engineering 128, pages 219-244.
Crossref
Gunjan Soni, Vipul Jain, Felix T.S. Chan, Ben Niu & Surya Prakash. (2019) Swarm intelligence approaches in supply chain management: potentials, challenges and future research directions. Supply Chain Management: An International Journal 24:1, pages 107-123.
Crossref
Huaxing Zhong, Min Liu, Jinghua Hao & Shenglong Jiang. (2018) An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System. IEEE Transactions on Systems, Man, and Cybernetics: Systems 48:8, pages 1332-1347.
Crossref
Sang-Oh Shim & KyungBae Park. (2016) Technology for Production Scheduling of Jobs for Open Innovation and Sustainability with Fixed Processing Property on Parallel Machines. Sustainability 8:9, pages 904.
Crossref
Hyun Joong Yoon & Jin Gon Kim. (2013) Heuristic scheduling policies for a semiconductor wafer fabrication facility: minimizing variation of cycle times. The International Journal of Advanced Manufacturing Technology 67:1-4, pages 171-180.
Crossref
Yi-Feng Hung, Chao-Hsiang Liang & James C. Chen. (2013) Sensitivity search for the rescheduling of semiconductor photolithography operations. The International Journal of Advanced Manufacturing Technology 67:1-4, pages 73-84.
Crossref
June-Young Bang, Yeong-Dae Kim & Seong-Woo Choi. (2012) Multiproduct Lot Merging–Splitting Algorithms for Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing 25:2, pages 200-210.
Crossref
June-Young Bang & Yeong-Dae Kim. (2010) Hierarchical Production Planning for Semiconductor Wafer Fabrication Based on Linear Programming and Discrete-Event Simulation. IEEE Transactions on Automation Science and Engineering 7:2, pages 326-336.
Crossref
Li Li, Fei Qiao, Xiaoyu Tian & Qidi Wu. (2009) Ant colony optimization based scheduling for a semiconductor wafer fabrication facility with bottleneck stations. Ant colony optimization based scheduling for a semiconductor wafer fabrication facility with bottleneck stations.
Kuo-Ching Ying & Shih-Wei Lin. (2009) Raising the hit rate for wafer fabrication by a simple constructive heuristic. Expert Systems with Applications 36:2, pages 2894-2900.
Crossref
Huiran Liu, Zhibin Jiang & Richard Y.K. Fung. (2009) Performance modeling, real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets. Computers & Industrial Engineering 56:1, pages 121-137.
Crossref
June-Young Bang, Jae-Hun Kang, Bong-Kyun Kim & Yeong-Dae Kim. (2008) Multi-product lot merging/splitting algorithms for a semiconductor wafer fabrication. Multi-product lot merging/splitting algorithms for a semiconductor wafer fabrication.
Li Li & Fei Qiao. (2008) The impact of the qual-run requirements of APC on the scheduling performance in semiconductor manufacturing. The impact of the qual-run requirements of APC on the scheduling performance in semiconductor manufacturing.
Vipul Jain & Lyes Benyoucef. (2008) Managing long supply chain networks: some emerging issues and challenges. Journal of Manufacturing Technology Management 19:4, pages 469-496.
Crossref
Yeong-Dae Kim, June-Young Bang, Kwee-Yeon An & Seung-Kil Lim. (2008) A Due-Date-Based Algorithm for Lot-Order Assignment in a Semiconductor Wafer Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing 21:2, pages 209-216.
Crossref
Gonca Tuncel & G. Mirac Bayhan. (2006) Applications of Petri nets in production scheduling: a review. The International Journal of Advanced Manufacturing Technology 34:7-8, pages 762-773.
Crossref
Vipul Jain, Lyes Benyoucef & S. G. Deshmukh. (2007) A new approach to model goal and plan conflicts in a dynamic supply chain. A new approach to model goal and plan conflicts in a dynamic supply chain.
Zheng-Cai Cao, Fei Qiao & Qi-Di Wu. (2007) Queueing Generalized Stochastic Colored Timed Petri Nets-based Approach to Modeling for Semiconductor Wafer Fabrication. Queueing Generalized Stochastic Colored Timed Petri Nets-based Approach to Modeling for Semiconductor Wafer Fabrication.
Mark Stevenson & Linda C. Hendry. (2006) Aggregate load-oriented workload control: A review and a re-classification of a key approach. International Journal of Production Economics 104:2, pages 676-693.
Crossref
Vishnu Erramilli & Scott J. Mason. (2006) Multiple Orders Per Job Compatible Batch Scheduling. IEEE Transactions on Electronics Packaging Manufacturing 29:4, pages 285-296.
Crossref
Amrusha Varadarajan & Subhash C. Sarin. (2006) A SURVEY OF DISPATCHING RULES FOR OPERATIONAL CONTROL IN WAFER FABRICATION. IFAC Proceedings Volumes 39:3, pages 715-726.
Crossref
George Kenyon, Cem Canel & Brian D. Neureuther. (2005) The impact of lot-sizing on net profits and cycle times in the n-job, m-machine job shop with both discrete and batch processing. International Journal of Production Economics 97:3, pages 263-278.
Crossref
Vipul Jain, S. Wadhwa & S. G. Deshmukh. (2005) e-Commerce and supply chains: Modelling of dynamics through fuzzy enhanced high level petri net. Sadhana 30:2-3, pages 403-429.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.