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Original Articles

Analytical approach to estimating AMHS performance in 300 mm fabs

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Pages 571-590 | Received 01 Mar 2006, Published online: 22 Feb 2007

Keep up to date with the latest research on this topic with citation updates for this article.

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Mehrdad Mohammadi, Stéphane Dauzère-Pérès & Claude Yugma. (2019) Performance evaluation of single and multi-class production systems using an approximating queuing network. International Journal of Production Research 57:5, pages 1497-1523.
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J. Zhang, W. Qin & L.H. Wu. (2016) A performance analytical model of automated material handling system for semiconductor wafer fabrication system. International Journal of Production Research 54:6, pages 1650-1669.
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Kuo-Hao Chang, Yu-Hsuan Huang & Shih-Pang Yang. (2014) Vehicle fleet sizing for automated material handling systems to minimize cost subject to time constraints. IIE Transactions 46:3, pages 301-312.
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Sidhartha S. Padhi, Stephan M. Wagner, Tarikere T. Niranjan & Vijay Aggarwal. (2013) A simulation-based methodology to analyse production line disruptions. International Journal of Production Research 51:6, pages 1885-1897.
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Chao-Jung Huang, Kuo-Hao Chang & James T. Lin. (2012) Optimal vehicle allocation for an Automated Materials Handling System using simulation optimisation. International Journal of Production Research 50:20, pages 5734-5746.
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N. Li, Z. Jiang, G. Liu & Z. Zhang. (2012) Analysis of quality-caused re-entrance electrical test system in semiconductor manufacturing by Markov method. International Journal of Production Research 50:12, pages 3486-3497.
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Muh-Cherng Wu, Chang-Fu Shih & Chen-Fu Chen. (2010) An analysis of the ceiling height requirement for a large-scale semiconductor fab. International Journal of Production Research 48:12, pages 3697-3706.
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Dima Nazzal & LeonF. McGinnis. (2008) Throughput performance analysis for closed-loop vehicle-based material handling systems. IIE Transactions 40:11, pages 1097-1106.
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Articles from other publishers (16)

Seolhui Son & Jaewoo Chung. (2023) Evaluation of Investment Strategies for Automated Material Handling Systems in Semiconductor/Display Fabrication. Journal of Advanced Manufacturing Systems 22:04, pages 953-969.
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Yifei Zhang, Yougao Li, Xiangyang Xue, Jianfeng Feng & Siming Chen. (2023) Visual Exploration and Planning of the Automated Material Handling System for Smart Factory in the Immersive Environment. Visual Exploration and Planning of the Automated Material Handling System for Smart Factory in the Immersive Environment.
Kuo-Hao Chang & Robert Cuckler. (2021) Applying Simulation Optimization for Agile Vehicle Fleet Sizing of Automated Material Handling Systems in Semiconductor Manufacturing. Asia-Pacific Journal of Operational Research 39:02.
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Lihui Wu, Zhongwei Zhang, Jie Zhang, Ray Y. Zhong & Junliang Wang. (2021) A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems. Journal of Manufacturing Systems 58, pages 316-334.
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Mehrdad Mohammadi, Stéphane Dauzère-pérès, Claude Yugma & Maryam Karimi-Mamaghan. (2020) A queue-based aggregation approach for performance evaluation of a production system with an AMHS. Computers & Operations Research 115, pages 104838.
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Chrissoleon T. Papadopoulos, Jingshan Li & Michael E.J. O'Kelly. (2019) A classification and review of timed Markov models of manufacturing systems. Computers & Industrial Engineering 128, pages 219-244.
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Lihui Wu, Zhongwei Zhang & Jie Zhang. (2019) A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System. IEEE Access 7, pages 174028-174041.
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Chen-Fu Chien, Che-Wei Chou & Hui-Chun Yu. (2016) A Novel Route Selection and Resource Allocation Approach to Improve the Efficiency of Manual Material Handling System in 200-mm Wafer Fabs for Industry 3.5. IEEE Transactions on Automation Science and Engineering 13:4, pages 1567-1580.
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Ali Ben-Salem, Claude Yugma, Emmanuel Troncet & Jacques Pinaton. (2016) AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering. AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering.
Jaewoo Chung. (2015) Estimating arrival times of transportation jobs for automated material handling in LCD fabrication facilities. Journal of Manufacturing Systems 35, pages 112-119.
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James T. Lin & Chao-Jung Huang. (2014) A simulation-based optimization approach for a semiconductor photobay with automated material handling system. Simulation Modelling Practice and Theory 46, pages 76-100.
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Yunjung Suh & Jaewoo Chung. (2014) Logistics Priority Management under Multiple Performance Metrics. Journal of Applied Sciences 14:3, pages 245-251.
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Jae-Woo Chung & Yeon-Ho Hur. (2012) Congestion Management with Arrival Estimation of Unit Loads in an Automated Material Handling System. Korean Management Science Review 29:1, pages 131-141.
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Lihui Wu, Jianwei Wang & Jie Zhang. 2011. Knowledge Engineering and Management. Knowledge Engineering and Management 173 178 .
Jaewoo Chung & Jose M.A. Tanchoco. 2009. Springer Handbook of Automation. Springer Handbook of Automation 961 979 .
Dima Nazzal & Leon F. McGinnis. (2007) Expected Response Times for Closed-Loop Multivehicle AMHS. IEEE Transactions on Automation Science and Engineering 4:4, pages 533-542.
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