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Original Articles

Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

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Pages 487-507 | Received 01 Mar 2006, Published online: 22 Feb 2007

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Chelliah Sriskandarajah & Bala Shetty. (2018) A review of recent theoretical development in scheduling dual-gripper robotic cells. International Journal of Production Research 56:1-2, pages 817-847.
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Anna Rotondo, Paul Young & John Geraghty. (2014) EF-based strategies for productivity improvements at wet-etch stations. Production Planning & Control 25:11, pages 958-968.
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Adrián M. Aguirre, Carlos A. Méndez & Pedro M. Castro. (2014) A hybrid scheduling approach for automated flowshops with material handling and time constraints. International Journal of Production Research 52:9, pages 2788-2806.
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Jianguang Feng, Ada Che & Nengmin Wang. (2014) Bi-objective cyclic scheduling in a robotic cell with processing time windows and non-Euclidean travel times. International Journal of Production Research 52:9, pages 2505-2518.
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Heejung Kim, Hyun-Jung Kim, Jun-Ho Lee & Tae-Eog Lee. (2013) Scheduling dual-armed cluster tools with cleaning processes. International Journal of Production Research 51:12, pages 3671-3687.
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Kamil Erkan Kabak, Cathal Heavey & Vincent Corbett. (2012) Capacity modelling of a wet bench cluster tool with material handling robot. International Journal of Computer Integrated Manufacturing 25:11, pages 1029-1046.
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Ada Che, Zhen Zhou, Chengbin Chu & Haoxun Chen. (2011) Multi-degree cyclic hoist scheduling with time window constraints. International Journal of Production Research 49:19, pages 5679-5693.
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Lin Danping & Carman K.M. Lee. (2011) A review of the research methodology for the re-entrant scheduling problem. International Journal of Production Research 49:8, pages 2221-2242.
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Ada Che, Pengyu Yan, Naiding Yang & Chengbin Chu. (2010) Optimal cyclic scheduling of a hoist and multi-type parts with fixed processing times. International Journal of Production Research 48:5, pages 1225-1243.
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Tae-Eog Lee, Hyun-Jung Kim & Tae-Sun Yu. 2023. Springer Handbook of Automation. Springer Handbook of Automation 841 863 .
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Tatsushi Nishi, Yushin Watanabe & Masaru Sakai. (2018) An Efficient Deadlock Prevention Policy for Noncyclic Scheduling of Multicluster Tools. IEEE Transactions on Automation Science and Engineering 15:4, pages 1677-1691.
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Ali Allahverdi, Harun Aydilek & Asiye Aydilek. (2018) No-wait flowshop scheduling problem with two criteria; total tardiness and makespan. European Journal of Operational Research 269:2, pages 590-601.
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Tianpegn Bao & Huangang Wang. (2017) Cyclic Scheduling of Multi-Cluster Tools Based on Mixed Integer Programming. IEEE Transactions on Semiconductor Manufacturing 30:4, pages 515-525.
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Tianpeng Bao & Huangang Wang. (2017) Cyclic scheduling of multi-cluster tools based on equivalent processing modules. Cyclic scheduling of multi-cluster tools based on equivalent processing modules.
Chunrong Pan, Kun Zhao & Yi-Sheng Huang. (2017) Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers. Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers.
Tae-Eog Lee, Hyun-Jung Kim, Dong-Hyun Roh & Ramavarapu S. Sreenivas. (2017) Characterizing Token Delays of Timed Event Graphs for $K$- Cyclic Schedules. IEEE Transactions on Automatic Control 62:2, pages 961-966.
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Ali Allahverdi. (2016) A survey of scheduling problems with no-wait in process. European Journal of Operational Research 255:3, pages 665-686.
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Nai Qi Wu, Mengchu Zhou, Feng Chu & Saïd mammar. 2015. Contemporary Issues in Systems Science and Engineering. Contemporary Issues in Systems Science and Engineering 289 315 .
ChunRong Pan, MengChu Zhou, Yan Qiao & NaiQi Wu. (2015) Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review. Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review.
Anna Rotondo, Paul Young & John Geraghty. (2015) Sequencing optimisation for makespan improvement at wet-etch tools. Computers & Operations Research 53, pages 261-274.
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Hyun-Jung Kim, Jun-Ho Lee & Tae-Eog Lee. (2014) Non-Cyclic Scheduling of a Wet Station. IEEE Transactions on Automation Science and Engineering 11:4, pages 1262-1274.
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Anna Rotondo, John Geraghty & Paul Young. (2012) Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool. Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool.
Hyun-Jung Kim, Jun-Ho Lee & Tae-Eog Lee. (2012) Scheduling a wet station using a branch and bound algorithm. Scheduling a wet station using a branch and bound algorithm.
Chihyun Jung & Tae-Eog Lee. (2012) An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems. IEEE Transactions on Semiconductor Manufacturing 25:2, pages 186-199.
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Adrián M. Aguirre, Carlos A. Méndez & Pedro M. Castro. (2011) A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems. Computers & Chemical Engineering 35:12, pages 2960-2972.
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Adrián M. Aguirre, Carlos A. Méndez & Pedro M. Castro. 2011. 21st European Symposium on Computer Aided Process Engineering. 21st European Symposium on Computer Aided Process Engineering 990 994 .
Kamil Erkan Kabak, Cathal Heavey & Vincent Corbett. (2010) Performance improvement for a wet bench tool. Performance improvement for a wet bench tool.
Jun-Ho Lee & Tae-Eog Lee. (2010) An open scheduling architecture for cluster tools. An open scheduling architecture for cluster tools.
Tae-Eog Lee. 2009. Springer Handbook of Automation. Springer Handbook of Automation 911 926 .
Tae-Eog Lee. (2008) A review of scheduling theory and methods for semiconductor manufacturing cluster tools. A review of scheduling theory and methods for semiconductor manufacturing cluster tools.
Chihyun Jung & Tae-Eog Lee. (2008) Efficient scheduling method based on an assignment model for robotized cluster tools. Efficient scheduling method based on an assignment model for robotized cluster tools.
Ja-Hee Kim & Tae-Eog Lee. (2008) Schedulability Analysis of Time-Constrained Cluster Tools With Bounded Time Variation by an Extended Petri Net. IEEE Transactions on Automation Science and Engineering 5:3, pages 490-503.
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Heiko Aydt, Stephen John Turner, Wentong Cai, Malcolm Yoke Hean Low, Peter Lendermann & Boon Ping Gan. 2008. Computational Science – ICCS 2008. Computational Science – ICCS 2008 26 35 .

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