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Journal of Quality Technology
A Quarterly Journal of Methods, Applications and Related Topics
Volume 43, 2011 - Issue 2
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Articles

Monitoring Batch Processes with Multiple On–Off Steps in Semiconductor Manufacturing

Shui-Pin LeeChing Yun University, Taoyuan, Taiwan32097View further author information
,
An-Kuo ChaoNational Tsing Hua University, Hsinchu, Taiwan30013View further author information
,
Fugee TsungHong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong KongView further author information
,
David Shan Hill WongNational Tsing Hua University, Hsinchu, Taiwan30013View further author information
,
Sheng-Tsiang TsengNational Tsing Hua University, Hsinchu, Taiwan30013View further author information
&
Shi-Shang JangNational Tsing Hua University, Hsinchu, Taiwan30013View further author information
Pages 142-157 | Published online: 21 Nov 2017

Citations (19)

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Read on this site (5)

Xin Zan, Di Wang & Xiaochen Xian. (2023) Spatial Rank-Based Augmentation for Nonparametric Online Monitoring and Adaptive Sampling of Big Data Streams. Technometrics 65:2, pages 243-256.
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Chen Zhang, Nan Chen & Jianguo Wu. (2020) Spatial rank-based high-dimensional monitoring through random projection. Journal of Quality Technology 52:2, pages 111-127.
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Chen Zhang, Hao Yan, Seungho Lee & Jianjun Shi. (2018) Multiple profiles sensor-based monitoring and anomaly detection. Journal of Quality Technology 50:4, pages 344-362.
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Peihua Qiu, Xuemin Zi & Changliang Zou. (2018) Nonparametric Dynamic Curve Monitoring. Technometrics 60:3, pages 386-397.
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Changliang Zou, Sheng-Tsaing Tseng & Zhaojun Wang. (2014) Outlier detection in general profiles using penalized regression method. IIE Transactions 46:2, pages 106-117.
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Articles from other publishers (14)

Jeongsun Ahn, Hong-Yeon Kim, Sang-Hyun Cho, Hyun-Jung Kim, Hongyeon Kim, Hyeonjeong Choi & Dain Ham. (2023) Semiconductor Equipment Health Monitoring With Multi-View Data. Semiconductor Equipment Health Monitoring With Multi-View Data.
Anan Tang, Amitava Mukherjee & Ximing Wang. (2023) Distribution-free Phase-II monitoring of high-dimensional industrial processes via origin and modified interpoint distance based algorithms. Computers & Industrial Engineering 179, pages 109161.
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Shuen‐Lin Jeng & Yin‐Chen Chang. (2023) Classifying and clustering noisy images using subset learning based on convolutional neural networks. Quality and Reliability Engineering International.
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Han Zhou, Hongpeng Yin, Dandan Zhao & Li Cai. (2023) Incremental Learning and Conditional Drift Adaptation for Nonstationary Industrial Process Fault Diagnosis. IEEE Transactions on Industrial Informatics 19:4, pages 5935-5944.
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Dima El Jamal, Bouchra Ananou, Guillaume Graton, Moustapha Ouladsine & Jacques Pinaton. (2022) LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes. LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes.
Lei Shu, Yu Chen, Weiping Zhang & Xueqin Wang. (2022) Spatial rank-based high-dimensional change point detection via random integration. Journal of Multivariate Analysis 189, pages 104942.
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Jiayang Ren & Dong Ni. (2021) A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations. IEEE Transactions on Semiconductor Manufacturing 34:4, pages 483-492.
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Hamideh Rostami, Jakey Blue, Argon Chen & Claude Yugma. (2021) Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing. International Journal of Intelligent Systems 36:6, pages 2618-2638.
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Jinyu Guo, Xin Wang & Yuan Li. (2019) Fault detection based on improved local entropy locality preserving projections in multimodal processes. Journal of Chemometrics 33:5.
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Jinyu Guo, Lulu Zhong & Yuan Li. (2018) Fault detection based on difference locality preserving projections for the semiconductor process. Journal of Chemometrics 32:8.
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Geert Gins, Jan F.M. Van Impe & Marco S. Reis. (2018) Finding the optimal time resolution for batch-end quality prediction: MRQP – A framework for multi-resolution quality prediction. Chemometrics and Intelligent Laboratory Systems 172, pages 150-158.
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Jinyu Guo, Xin Wang, Yuan Li & Guozhu Wang. (2017) Fault detection based on weighted difference principal component analysis. Journal of Chemometrics 31:11.
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Wenwan Yang, Changliang Zou & Zhaojun Wang. (2016) Nonparametric Profile Monitoring using Dynamic Probability Control Limits. Quality and Reliability Engineering International 33:5, pages 1131-1142.
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A. Thieullen, M. Ouladsine & J. Pinaton. (2012) A Survey of Health Indicators and Data-Driven Prognosis in Semiconductor Manufacturing Process. IFAC Proceedings Volumes 45:20, pages 19-24.
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