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Radiation Effects Volume 52, 1980 - Issue 3-4
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Original Articles

On the energy distribution and angular distribution of sputtered particles

H. E. Roosendaal Fakultät für Physik, Universität Bielefeld, 4800, Bielefeld 1, Federal Republic of Germany
&
J. B. Sanders FOM Instituut vokr Atoom- & Molecuulfysica, Kruislaan 407, 1098 SJ, Amsterdam-Watergraafsmeer, The Netherlands
Pages 137-143 | Received 01 Jan 1980, Published online: 19 Aug 2006

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V.V. Marinyuk & V.S. Remizovich. (2001) Method of Green's functions and invariance principle in the problem of sputtering of amorphous and polycrystalline targets. Radiation Effects and Defects in Solids 154:2, pages 99-122.
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I.M. Fayazov, Sh.N. Garin, A.V. Sidorov & A.I. Yunusov. (1992) The angular distributions of sputtered particles from nickel. Radiation Effects and Defects in Solids 124:2, pages 197-202.
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Y. Yamamura, T. Takiguchi & M. Ishida. (1991) Energy and angular distributions of sputtered atoms at normal incidence. Radiation Effects and Defects in Solids 118:3, pages 237-261.
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V.E. Yurasova & I.F. Urazgil'din. (1991) Charge exchange features of excited sputtered particle production. Radiation Effects and Defects in Solids 117:1-3, pages 99-111.
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B.N. Makarenko, A.B. Popov, A.A. Shaporenko & A.P. Shergin. (1991) Study of Cu and Cu + (n=1, 2, 3) cluster formation under ion bombardment. Radiation Effects and Defects in Solids 116:1-2, pages 15-20.
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B.N. Makarenko, A.B. Popov, A.A. Shaporenko & A.P. Shergin. (1990) Velocity dependence of ionization probability of BE, CU, AG, W, PB and SN atoms sputtered by 5.5 KEV ar+ ions. Radiation Effects and Defects in Solids 113:4, pages 263-268.
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E.S. Mashkova & V.A. Molchanov. (1989) Some of the current trends in the studies of sputtering. Radiation Effects and Defects in Solids 108:2-4, pages 307-335.
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A.I. Dodonov, S.D. Fedorovich, E.A. Krylova, E.S. Mashkova & V.A. Molchanov. (1988) Spatial distribution of sputtered particles from polycrystals under ion bombardment. Radiation Effects 107:1, pages 15-21.
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Y. Yamamura, C. Mössner & H. Oechsner. (1987) Angular distributions of sputtered atoms from ion-bombarded surfaces. Radiation Effects 105:1-2, pages 31-41.
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E.S. Mashkova & V.A. Molchanov. (1987) Sputtering and surface scattering at oblique ion incidence onto crystals. Radiation Effects 102:1-4, pages 125-141.
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K. A. Tolpin & V. E. Yurasova. (2022) Spatial Distribution of Secondary Ions from Single-Crystal- and Amorphous Targets. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 16:4, pages 497-502.
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Jacques Bernstein, Jürgen W. Gerlach, Annemarie Finzel & Carsten Bundesmann. (2022) Ion beam sputter deposition of $$\hbox {SiO}_2$$ thin films using oxygen ions. The European Physical Journal B 95:3.
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V.E. Yurasova. (2021) Coincidence method for study of secondary particle emission. Vacuum 190, pages 110296.
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A. I. Tolmachev & L. Forlano. (2021) Dependence of the Parameters of Cascade Particle Multiplication on the Type of Atomic Potential. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 15:4, pages 759-762.
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A. I. Tolmachev & L. Forlano. (2020) Sputtered Atom Energy Distribution versus the Interatomic Interaction Law. Technical Physics 65:6, pages 851-854.
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Dmitry Kalanov, André Anders & Carsten Bundesmann. (2019) Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 37:5.
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Carsten Bundesmann & Thomas Amelal. (2019) Secondary particle properties for the ion beam sputtering of TiO2 in a reactive oxygen atmosphere. Applied Surface Science 485, pages 391-401.
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A. I. Tolmachev & L. Forlano. (2018) Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory. Technical Physics 63:10, pages 1455-1458.
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Thomas Lautenschläger & Carsten Bundesmann. (2017) Reactive ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35:4.
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T. Lautenschläger, R. Feder, H. Neumann, C. Rice, M. Schubert & C. Bundesmann. (2016) Ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 385, pages 30-39.
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K. F. Minnebaev, K. A. Tolpin & V. E. Yurasova. (2013) Secondary particle emission from a ferromagnetic binary compound. Journal of Experimental and Theoretical Physics 116:2, pages 186-196.
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Peter Sigmund. (2012) Recollections of fifty years with sputtering. Thin Solid Films 520:19, pages 6031-6049.
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Tomoyoshi Motohiro. 2012. Handbook of Sputtering Technology. Handbook of Sputtering Technology 143 294 .
Stijn Mahieu, Koen Van Aeken & Diederik Depla. 2008. Reactive Sputter Deposition. Reactive Sputter Deposition 199 227 .
V.I. Shulga. (2007) Comparative study of silicon and germanium sputtering by 1–20keV Ar ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 254:2, pages 200-204.
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Hubert Gnaser. 2007. Sputtering by Particle Bombardment. Sputtering by Particle Bombardment 231 328 .
K. Czerski, G. Schiwietz, M. Roth, F. Staufenbiel, P. Grande & S.R. Bhattacharyya. (2004) Non-equilibrium emission of secondary ions from BeO films sputtered by swift gold ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 225:1-2, pages 72-77.
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W. Jacobs, A. Kersch, A. Ruf & N. Urbansky. (2003) Determination of Ti+-flux and Ar+-flux of ionized physical vapor deposition of titanium from multiscale model calibration with test structures. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21:4, pages 922-936.
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V.I. Shulga. (2002) The density and binding effects in sputtering by ions of widely varying masses. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 195:3-4, pages 291-301.
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H. Wolf, R. Streiter, W. Tirschler, H. Giegengack, N. Urbansky & T. Gessner. (2002) Investigation of long throw PVD of titanium films from polycrystalline targets with texture. Microelectronic Engineering 63:4, pages 329-345.
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M. Stepanova & S. K. Dew. (2002) Discrete-path transport theory of physical sputtering. Journal of Applied Physics 92:3, pages 1699-1708.
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V.I. Shulga. (2002) Density effects in sputtering at normal and oblique ion bombardment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 187:2, pages 178-188.
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M. Stepanova & S. K. Dew. (2001) Estimates of differential sputtering yields for deposition applications. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19:6, pages 2805-2816.
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V. V. Marinyuk & V. S. Remizovich. (2001) The effect of inelastic loss on the development of interatomic collision cascades. Technical Physics 46:10, pages 1235-1241.
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V.I. Shulga. (2001) Density and binding effects in low-energy sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 179:4, pages 485-496.
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V.I. Shulga. (2001) The density effects in polycrystal sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 174:1-2, pages 77-90.
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V.I. Shulga. (2000) Angular distribution of atoms sputtered from amorphous and polycrystalline targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 164-165, pages 733-747.
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V.A. Kurnaev, V.V. Marinyuk, V.S. Remizovich & N.N. Trifonov. (2000) Contributions of the inward and backward ion fluxes to sputtering at the grazing incidence of the beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 164-165, pages 848-853.
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V.I. Shulga. (1999) Depth-dependent angular distribution of sputtered atoms. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 155:4, pages 382-394.
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A. Goehlich & H.F. Döbele. (1996) Angle resolved velocity distributions of sputtered aluminum atoms. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 115:1-4, pages 489-492.
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G. M. Turner, S. M. Rossnagel & J. J. Cuomo. (1994) Measured radial and angular distributions of sputtered atoms in a planar magnetron discharge. Journal of Applied Physics 75:7, pages 3611-3618.
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B. Elstner, A. Schöpke & B. Selle. (1994) RBS analysis of thin MoSix films: Correlation between stoichiometry and some features of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85:1-4, pages 297-300.
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Peter Sigmund & Mads W. Sckerl. (1993) Momentum asymmetry and the isotope puzzle in sputtering by ion bombardment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 82:2, pages 242-254.
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T. J. Whitaker, Aijun Li, P. L. Jones & R. O. Watts. (1993) Angular distributions of sputtered zirconium atoms. The Journal of Chemical Physics 98:7, pages 5887-5898.
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T. J. Whitaker, P. L. Jones, Aijun Li & R. O. Watts. (1993) An instrument for measuring angular distribution of sputtered neutral atoms. Review of Scientific Instruments 64:2, pages 452-459.
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P. Fielitz, H. Kerkow & R. Wedell. (1992) Determination of the mean velocity for sputtered particles from amorphous and crystalline solids. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 67:1-4, pages 580-585.
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Koichi Kanaya, Yoshinori Muranaka, Katsuhisa Yonehara & Koichi Adachi. (1992) Quantitative analysis of sputtering due to ion beam bombardment of solids and biological specimens in high resolution electron microscopy. Micron and Microscopica Acta 23:1-2, pages 45-64.
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Yoko KITANOToshiko SUZUKIKozo TSUNOYAMA. (1991) Determination of Sputtering Yields for Quantitative In-depth Analysis of Surface Layer of Steels. Tetsu-to-Hagane 77:11, pages 1972-1979.
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D.V. Ledyankin, I.F. Urazgil'din & V.E. Yurasova. (1990) Spatial distribution of secondary Si and Al ions in their excited and ground states. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 48:1-4, pages 585-588.
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A.I. Dodonov, I.M. Fayazov, E.A. Krylova, E.S. Mashkova, V.A. Molchanov & Yu.N. Zhukova. (1990) Effect of irradiated-surface topography on spatial distributions of sputtered particles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 48:1-4, pages 566-570.
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Yasunori Yamamura. (1990) Time-dependent angular distribution of sputtered particles from amorphous targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 45:1-4, pages 582-585.
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A. I. Dodonov, I. M. Fayazov, S. D. Fedorovich, E. A. Krylova, E. S. Maskova, V. A. Molchanov & W. Eckstein. (1989) Experimental and computer study of the spatial distributions of particles sputtered from polycrystals. Applied Physics A Solids and Surfaces 49:3, pages 299-304.
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Y. Yamamura & K. Muraoka. (1989) Over-cosine angular distributions of sputtered atoms at normal incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 42:2, pages 175-181.
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I.R. Chakarov, V.T. Cherepin, D.S. Karpuzov, A.A. Kosyachkov & R.G. Vichev. (1989) Angle and energy distributions of sputtered particles from molybdenum (110) surfaces. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 39:1-4, pages 81-85.
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A. Oliva. 1988. Materials Modification by High-fluence Ion Beams. Materials Modification by High-fluence Ion Beams 31 81 .
A.I. Dodonov, S.D. Fedorovich, E.A. Krylova, E.S. Mashkova & V.A. Molchanov. (1988) Spatial distributions of sputtered particles under ion bombardment of polycrystals. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 33:1-4, pages 534-537.
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R.A. Haring, H.E. Roosendaal & P.C. Zalm. (1987) On the energy and angular distribution of sputtered polyatomic molecules. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 28:2, pages 205-213.
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Harry J. Whitlow, Mikko Hautala & Bo U.R. Sundqvist. (1987) Collision cascade parameters for slow particles impinging on biomolecule targets. International Journal of Mass Spectrometry and Ion Processes 78, pages 329-340.
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Peter Sigmund. (1987) Mechanisms and theory of physical sputtering by particle impact. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 27:1, pages 1-20.
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K.T. Waldeer & H.M. Urbassek. (1986) On the angular distribution of sputtered particles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 518-524.
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J. Dembowski, H. Oechsner, Y. Yamamura & M. Urbassek. (1986) Energy distributions of neutral atoms sputtered from Cu, V and Nb under different bombardment and ejection angles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 464-470.
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Helge L. Bay. (1986) Laser induced fluorescence as a technique for investigations of sputtering phenomena. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 430-445.
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Harry J. Whitlow & Mikko Hautala. (1986) Ballistic collision cascade anisotropies in amorphous, polycrystalline and single-crystal solids. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 370-374.
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J. Roth. 1986. Physics of Plasma-Wall Interactions in Controlled Fusion. Physics of Plasma-Wall Interactions in Controlled Fusion 351 388 .
G. Bräuer, D. Hasselkamp, W. Krüger & A. Scharmann. (1985) The angular distribution of particles sputtered from Cu, Zr, and Au surfaces by ion bombardment at grazing incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 12:4, pages 458-463.
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S. Kundu, D. Ghose, D. Basu & S.B. Karmohapatro. (1985) The angular distribution of sputtered silver atoms. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 12:3, pages 352-357.
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Mikko Hautala & Harry J. Whitlow. (1985) Momentum and recoil-flux anisotropies in collision-cascades: Influence on sputtered particle angular distributions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 6:3, pages 466-473.
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R.A. Haring, R. Pedrys, A. Haring & A.E. De Vries. (1984) Sputtering of condensed noble gases by keV heavy ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 4:1, pages 40-54.
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J. Roth, J. Bohdansky & W. Eckstein. (1983) Angular distributions and differential sputtering yields of binary compounds as a function of angle of incidence. Nuclear Instruments and Methods in Physics Research 218:1-3, pages 751-756.
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H. E. Roosendaal, U. Littmark & J. B. Sanders. (1982) Spatial distribution of recoiling atoms with a specific momentum generated in a collision cascade. Physical Review B 26:9, pages 5261-5263.
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H.E. Roosendaal, R.A. Haring & J.B. Sanders. (1982) Surface disruption as an observable factor in the energy distribution of sputtered particles. Nuclear Instruments and Methods in Physics Research 194:1-3, pages 579-581.
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