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Invited review

Sputtering models—A synoptic view

Pages 1-64 | Received 02 Nov 1982, Published online: 19 Aug 2006

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O.F. Goktepe. (1994) A study of parametric relationships in ion-beam processes. Radiation Effects and Defects in Solids null:1, pages 55-65.
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A.I. Dodonoy, E.S. Mashkova & V.A. Molchanov. (1989) Ejection of fast recoil atoms from solids under ion bombardment (medium-energy ion scattering by solid surfaces—part III. Radiation Effects and Defects in Solids 110:3-4, pages 227-341.
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E.S. Mashkova & V.A. Molchanov. (1989) Some of the current trends in the studies of sputtering. Radiation Effects and Defects in Solids 108:2-4, pages 307-335.
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DonE. Harrison$suffix/text()$suffix/text(). (1988) Application of molecular dynamics simulations to the study of ion-bombarded metal surfaces. Critical Reviews in Solid State and Materials Sciences 14:sup1, pages s1-s78.
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J. Wayne Rabalais. (1988) Direct recoil spectrometry. Critical Reviews in Solid State and Materials Sciences 14:4, pages 319-376.
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E.S. Mashkova & V.A. Molchanov. (1987) Sputtering and surface scattering at oblique ion incidence onto crystals. Radiation Effects 102:1-4, pages 125-141.
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DonE. Harrison$suffix/text()$suffix/text() & MarioM. Jakas. (1986) Simulation of the atomic collision cascade. Radiation Effects 99:1-4, pages 153-169.
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M.H. Shapiro, P.K. Haff, T.A. Tombrello, D.E. Harrison$suffix/text()$suffix/text() & R.P. Webb. (1985) Computer-simulated energy and angular distributions of sputtered Cu atoms. Radiation Effects 89:3-4, pages 243-255.
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V.I. Shulga. (1984) Computer simulation of single-crystal and polycrystal sputtering. II. Radiation Effects 82:3-4, pages 169-187.
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