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Radiation Effects Volume 89, 1985 - Issue 3-4
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Original Articles

Computer-simulated energy and angular distributions of sputtered Cu atoms

M. H. Shapiro Department of Physics, California State University, Fullerton Fullerton, California, 92634
,
P. K. Haff Division of Physics, Mathematics, and Astronomy, Caltech, Pasadena, California, 91125
,
T. A. Tombrello Division of Physics, Mathematics, and Astronomy, Caltech, Pasadena, California, 91125
,
D. E. Harrison Jr. Department of Physics, Naval Postgraduate School, Monterey, California, 93943
&
R. P. Webb Department of Electronics and Electrical Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, England
Pages 243-255 | Received 05 Dec 1983, Published online: 19 Aug 2006

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Read on this site (4)

P.T. Dawson & S.A. Petrone. (1991) Studies on Cr-Mo binary alloys: I. surface composition modifications induced by ion bombardment. Radiation Effects and Defects in Solids 115:4, pages 315-333.
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B.J. Garrison, K. Walzl, M. El-Maazawi, N. Winograd, C.T. Reimann & D.M. Deaven. (1989) A many-body embedded atom potential for describing ejection of atoms from surfaces. Radiation Effects and Defects in Solids 109:1-4, pages 287-292.
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DonE. Harrison$suffix/text()$suffix/text(). (1988) Application of molecular dynamics simulations to the study of ion-bombarded metal surfaces. Critical Reviews in Solid State and Materials Sciences 14:sup1, pages s1-s78.
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DonE. Harrison$suffix/text()$suffix/text() & MarioM. Jakas. (1986) Simulation of the atomic collision cascade. Radiation Effects 99:1-4, pages 153-169.
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Articles from other publishers (46)

Hubert Gnaser. 2007. Sputtering by Particle Bombardment. Sputtering by Particle Bombardment 231 328 .
Wolfgang Eckstein. 2007. Sputtering by Particle Bombardment. Sputtering by Particle Bombardment 33 187 .
M.H Shapiro & Ping Lu. (2004) The influence of the ion–atom potential on molecular dynamics simulations of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 215:3-4, pages 326-336.
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M.H. Shapiro, E. Trovato & T.A. Tombrello. (2001) Depth of origin of atoms sputtered from crystalline targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 180:1-4, pages 58-65.
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J. M. Bordes & Ph. Bauer. (2001) Depth of origin of sputtered atoms for elemental Al and Mg targets in physical vapor deposition processes. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19:3, pages 812-819.
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T.T. Nuver, H. Rudolph, P.A. Zeijlmans van Emmichoven & A. Niehaus. (2000) Preferential ejection of high-energy sputtered Cu atoms in keV atom – Cu(110) collisions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 164-165, pages 785-794.
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V.I. Shulga & W. Eckstein. (1998) Depth of origin of sputtered atoms for elemental targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 145:4, pages 492-502.
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M.H. Shapiro, K.R. Bengtson & T.A. Tombrello. (1995) Molecular dynamics simulations of sputtering from liquid GaIn targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 103:2, pages 123-130.
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S. W. Rosencrance, J. S. Burnham, D. E. Sanders, C. He, B. J. Garrison, N. Winograd, Z. Postawa & A. E. DePristo. (1995) Mechanistic study of atomic desorption resulting from the keV-ion bombardment of fcc{001} single-crystal metals. Physical Review B 52:8, pages 6006-6014.
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G. Betz & W. Husinsky. (1995) Molecular dynamics studies of cluster emission in sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 102:1-4, pages 281-292.
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M.H. Shapiro & T.A. Tombrello. (1995) An instantaneous inelastic energy loss algorithm for use in molecular dynamics simulations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 102:1-4, pages 277-280.
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Gerhard Betz & Karl Wien. (1994) Energy and angular distributions of sputtered particles. International Journal of Mass Spectrometry and Ion Processes 140:1, pages 1-110.
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M.H. Shapiro & T.A. Tombrello. (1994) Molecular dynamics simulations of inelastic energy loss effects in sputtering II. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 94:3, pages 186-196.
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Dan N. Bernardo, Reena Bhatia & Barbara J. Garrison. (1994) keV particle bombardment of solids: molecular dynamics simulations and beyond. Computer Physics Communications 80:1-3, pages 259-273.
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Nghi Q. Lam & Kim Johannessen. (1992) Physical sputtering of CuNi alloys: a molecular dynamics study. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 71:4, pages 371-380.
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Kim Johannessen. (1992) Ejection patterns from a Cu monocrystal sputtered by low-energy Ar and Xe ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 71:2, pages 171-185.
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M.H. Shapiro & T.A. Tombello. (1991) Molecular dynamics simulation of nonlinear effects in sputtering — Au(100) and Au(111) targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 62:1, pages 35-42.
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M.H. Shapiro & T.A. Tombrello. (1991) Molecular dynamics simulations of energetic cluster impacts on Al, Cu and Au targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 58:2, pages 161-173.
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Wolfgang EcksteinWolfgang Eckstein. 1991. Computer Simulation of Ion-Solid Interactions. Computer Simulation of Ion-Solid Interactions 108 110 .
Nicholas Winograd & Barbara J. Garrison. 1991. Ion Spectroscopies for Surface Analysis. Ion Spectroscopies for Surface Analysis 45 141 .
Keith Broomfield, Robert A. Stansfield & David C. Clary. (1990) Classical trajectory calculations of non-linear sputtering: SiCl4 sputtering of a Cu(001) surface using ab initio potentials. Surface Science 227:3, pages 369-389.
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M.H. Shapiro & T.A. Tombrello. (1990) Molecular dynamics simulation of nonlinear effects in sputtering — Cu(100) targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 48:1-4, pages 557-561.
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M.H. Shapiro. (1989) Kinetic energy loss in sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 42:2, pages 290-292.
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Y. Yamamura & K. Muraoka. (1989) Over-cosine angular distributions of sputtered atoms at normal incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 42:2, pages 175-181.
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P. Sigmund, M.T. Robinson, M.I. Baskes, M. Hautala, F.Z. Cui, W. Eckstein, Y. Yamamura, S. Hosaka, T. Ishitani, V.I. Shulga, D.E. HarrisonJr.Jr., I.R. Chakarov, D.S. Karpuzo, E. Kawatoh, R. Shimizu, S. Valkealahti, R.M. Nieminen, G. Betz, W. Husinsky, M.H. Shapiro, M. Vicanek & H.M. Urbassek. (1989) Round Robin computer simulation of ejection probability in sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 36:2, pages 110-123.
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Keith Broomfield, Robert A. Stansfield & David C. Clary. (1988) Calculations on Ar+ sputtering of a Cu surface using an ab initio potential. Surface Science 202:1-2, pages 320-334.
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Hans Henrik Andersen. (1988) Sputtering from atomic-collision cascades. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 33:1-4, pages 466-473.
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B. J. Garrison, N. Winograd, D. M. Deaven, C. T. Reimann, D. Y. Lo, T. A. Tombrello, D. E. Harrison & M. H. Shapiro. (1988) Many-body embedded-atom potential for describing the energy and angular distributions of Rh atoms desorbed from ion-bombarded Rh{111}. Physical Review B 37:13, pages 7197-7204.
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M.H. Shapiro, T.A. Tombrello & Don E. HarrisonJrJr. (1988) Simulation of isotopic mass effects in sputtering, II. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 30:2, pages 152-158.
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P. C. Zalm. (2004) Quantitative sputtering. Surface and Interface Analysis 11:1-2, pages 1-24.
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Barbara J. Garrison, Curt T. Reimann, Nicholas Winograd & Don E. Harrison. (1987) Energy and angular distributions of Rh atoms ejected due to ion bombardment from Rh{111}: A theoretical study. Physical Review B 36:7, pages 3516-3521.
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T.A. Tombrello. (1987) Scratching the surface. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 27:1, pages 221-225.
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Peter Sigmund. (1987) Mechanisms and theory of physical sputtering by particle impact. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 27:1, pages 1-20.
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B.J. Garrison, N. Winograd, D. Lo, T.A. Tombrello, M.H. Shapiro & D.E. HarrisonJr.Jr.. (1987) Energy cost to sputter an atom from a surface in keV ion bombardment processes. Surface Science Letters 180:2-3, pages L129-L133.
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B.J. Garrison, N. Winograd, D. Lo, T.A. Tombrello, M.H. Shapiro & D.E. HarrisonJr.Jr.. (1987) Energy cost to sputter an atom from a surface in keV ion bombardment processes. Surface Science 180:2-3, pages L129-L133.
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Antonino Oliva, Roger Kelly & Giovanni Falcone. (1987) Comments on collisional sputtering theory. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 19-20, pages 101-108.
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D.Y. Lo, T.A. Tombrello & M.H. Shapiro. (1986) Liquid target generation techniques in molecular dynamics studies of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 17:3, pages 207-212.
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N. Winograd, P.H. Kobrin, G.A. Schick, J. Singh, J.P. Baxter & B.J. Garrison. (1986) Energy- and angle-resolved detection of neutral atoms desorbed from ion bombarded single crystals. Rh{111} and p(2 × 2)O/Rh{111}. Surface Science Letters 176:1-2, pages L817-L824.
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N. Winograd, P.H. Kobrin, G.A. Schick, J. Singh, J.P. Baxter & B.J. Garrison. (1986) Energy- and angle-resolved detection of neutral atoms desorbed from ion bombarded single crystals. Rh{111} and p(2 × 2)O/Rh{111}. Surface Science 176:1-2, pages L817-L824.
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M.H. Shapiro, D.Y. Lo, P.K. Haff & T.A. Tombrello. (1986) Simulation of sputtering from liquid Cu targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 13:1-3, pages 348-352.
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Roger Kelly & Antonio Oliva. (1986) New estimates of the characteristic depth of sputtering and of the bombardment-induced segregation ratio. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 13:1-3, pages 283-294.
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Roger Kelly. (1986) The surface binding energy in slow collisional sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 388-398.
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S. Valkealahti & R.M. Nieminen. (1986) Molecular dynamics simulation of the damage production in Al (110) surface with slow argon ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 365-369.
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M.H. Shapiro & T.A. Tombrello. (1986) Computer simulation of sticking and penetration of copper atoms on copper substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 18:1-6, pages 355-359.
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Roger Kelly & Antonino Oliva. 1986. Erosion and Growth of Solids Stimulated by Atom and Ion Beams. Erosion and Growth of Solids Stimulated by Atom and Ion Beams 41 69 .
M. H. Shapiro, D. Y. Lo & T. A. Tombrello. (2011) Computer Simulation of Sputtering from Two Component Liquid Metal Targets. MRS Proceedings 63.
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