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Radiation Effects Volume 89, 1985 - Issue 3-4
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Short Communication

Angular dependences of sputtering ratio, ion-electron emission coefficient and ion-induced photon emission yield at oblique ion incidence on crystalline targets

E. S. Mashkova Institute of Nuclear Physics, Moscow State University, Moscow, 119899, USSR
,
V. A. Molchanov Institute of Nuclear Physics, Moscow State University, Moscow, 119899, USSR
&
V. B. Fleurov Institute of Nuclear Physics, Moscow State University, Moscow, 119899, USSR
Pages 313-318 | Received 04 Sep 1984, Published online: 19 Aug 2006

Citations (6)

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Read on this site (4)

A.I. Dodonov, E.S. Mashkova, V.A. Molchanov & V.A. Snisar. (1987) Dependences of the intensity of optical emission from sputtered atoms on azimuthal angle of crystalline target rotation. Radiation Effects 102:1-4, pages 157-159.
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E.S. Mashkova & V.A. Molchanov. (1987) Sputtering and surface scattering at oblique ion incidence onto crystals. Radiation Effects 102:1-4, pages 125-141.
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SH.N. Garin, E.S. Mashkova, V.A. Molchanov, V.A. Snisar & V.B. Fleurov. (1985) Energy dependences of ion-induced photon emission from single crystals under ion bombardment at grazing incidence. Radiation Effects 88:1-2, pages 119-127.
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A.M. Borisov. (1985) Application of the transparency model to the description of single-crystal sputtering at small sliding angles of incident ions. Radiation Effects 89:3-4, pages 237-241.
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Articles from other publishers (2)

M.A. Karolewski. (2003) Sputtering of stepped Cu surfaces by 3 keV Ar projectiles with glancing angles of incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 211:2, pages 190-198.
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A.I. Dodonov, S.D. Fedorovich, E.A. Krylova, E.S. Mashkova & V.A. Molchanov. (1988) Spatial distributions of sputtered particles under ion bombardment of polycrystals. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 33:1-4, pages 534-537.
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