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Philosophical Magazine A Volume 63, 1991 - Issue 1
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Original Articles

A study of the initial stages of the oxidation of silicon using the Fresnel method

F. M. Ross Department of Materials Science and Metallurgy, Pembroke Street, Cambridge, CB2 3QZ, England
&
W. M. Stobbs Department of Materials Science and Metallurgy, Pembroke Street, Cambridge, CB2 3QZ, England
Pages 1-36 | Received 12 Feb 1990, Accepted 26 Feb 1990, Published online: 20 Aug 2006

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Joel Ribis, Patricia Donnadieu, Camille Flament, Jérôme Garnier, Frédéric Lepretre, Yves Serruys & Alexis Deschamps. (2016) Radiation-induced cavities in aluminium alloy imaged by in line electron holography. Philosophical Magazine 96:24, pages 2504-2517.
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Yimei Zhu, J. Tafto, L.H. Lewis & D.O. Welch. (1995) Electron microscopy of grain boundaries: An application to RE-Fe-B (RE = Pr or Nd) magnetic materials. Philosophical Magazine Letters 71:6, pages 297-305.
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F.M. Ross & W.M. Stobbs. (1991) Computer modelling for Fresnel contrast analysis. Philosophical Magazine A 63:1, pages 37-70.
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M. Serenyi, T. Lohner, P. Petrik & C. Frigeri. (2007) Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy. Thin Solid Films 515:7-8, pages 3559-3562.
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P.A. Midgley. (2001) An introduction to off-axis electron holography. Micron 32:2, pages 167-184.
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F. M. Ross & J. M. Gibson. 2001. Fundamental Aspects of Silicon Oxidation. Fundamental Aspects of Silicon Oxidation 35 60 .
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Rafal E Dunin-Borkowski. (2000) The development of Fresnel contrast analysis, and the interpretation of mean inner potential profiles at interfaces. Ultramicroscopy 83:3-4, pages 193-216.
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S. J. Lloyd & R. E. Dunin-Borkowski. (1999) Electronic structure of face-centered-tetragonal iron in ferromagnetic iron-copper multilayers. Physical Review B 59:3, pages 2352-2362.
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Zhigang Mao, Rafal E. Dunin‐Borkowski, Christopher B. Boothroyd & Kevin M. Knowles. (2005) Direct Measurement and Interpretation of Electrostatic Potentials at 24° [001] Tilt Boundaries in Undoped and Niobium‐Doped Strontium Titanate Bicrystals. Journal of the American Ceramic Society 81:11, pages 2917-2926.
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G. Jungk & T. Grabolla. (1998) Spectroscopic ellipsometry on silicon-oxide films on silicon. Thin Solid Films 335:1-2, pages 253-257.
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P. Moreau, N. Brun, C. A. Walsh, C. Colliex & A. Howie. (1997) Relativistic effects in electron-energy-loss-spectroscopy observations of the interface plasmon peak . Physical Review B 56:11, pages 6774-6781.
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S.J. Lloyd & R.E. Dunin-Borkowski. (2020) The Effect of Fe Layer Width on the Electron Structure of Ferromagnetic Face Centered Tetragonal Fe-Cu Multilayers. Microscopy and Microanalysis 3:S2, pages 517-518.
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V. Weidenhof, F. Gropper, U. Müller, L. Marosi, G. Cox, R. Houbertz & U. Hartmann. (2011) Morphological investigations on mesostructured metal oxides. Journal of Materials Research 12:6, pages 1634-1639.
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Ferhat Kara, Rafal E Dunin-Borkowski, Christopher B Boothroyd, John A Little & W Michael Stobbs. (1996) Fresnel contrast analysis of composition changes and space charge at grain boundaries in mullite. Ultramicroscopy 66:1-2, pages 59-71.
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David B. Williams & C. Barry CarterDavid B. Williams & C. Barry Carter. 1996. Transmission Electron Microscopy. Transmission Electron Microscopy 483 498 .
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Velimir Radmilovic & Michael A. O'Keefe. (2020) Fresnel effect in high-resolution TEM imaging of small particles. Proceedings, annual meeting, Electron Microscopy Society of America 53, pages 564-565.
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Cong-Yan Chen, Si-Qun Xiao & Mark E. Davis. (1995) Studies on ordered mesoporous materials III. Comparison of MCM-41 to mesoporous materials derived from kanemite. Microporous Materials 4:1, pages 1-20.
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M. Gajdardziska-Josifovska, J.K. Weiss & J.M. Cowley. (1995) Studies of Mo/Si multilayers with coherent electron beams. Ultramicroscopy 58:1, pages 65-78.
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Frances M. Ross, J.Murray Gibson & Ray D. Twesten. (1994) Dynamic observations of interface motion during the oxidation of silicon. Surface Science 310:1-3, pages 243-266.
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R.E. Dunin-Borkowski & W.M. Stobbs. (1993) The defocus contrast of a θ′ precipitate in Al-4wt%Cu: Fresnel fringe analysis applied to an atomically abrupt interface. Ultramicroscopy 52:3-4, pages 404-414.
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J.K. Weiss, W.J. de Ruijter, M. Gajdardziska-Josifovska, M.R. McCartney & David J. Smith. (1993) Applications of electron holography to the study of interfaces. Ultramicroscopy 50:3, pages 301-311.
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M. Sarkar, L. Calliari, L. Gonzo & F. Marchetti. (2004) Auger depth profiling of silicon dioxide on silicon: A factor analysis study. Surface and Interface Analysis 20:1, pages 60-68.
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W.M. Stobbs. (2020) The mensuration of interfaces. Proceedings, annual meeting, Electron Microscopy Society of America 50:1, pages 216-217.
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Frances M. Ross & J. Murray Gibson. (1992) Dynamic observations of interface propagation during silicon oxidation. Physical Review Letters 68:11, pages 1782-1785.
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W.M. Stobbs. (1992) Boundary characterisation methods using the TEM. Ultramicroscopy 40:3, pages 300-312.
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H. Gong & F.W. Schapink. (1992) On the investigation of local interface sharpness and period uniformity of multilayers in plan-view observation by CBED. Applied Surface Science 56-58, pages 643-649.
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W.C. Shih & W.M. Stobbs. (1991) The use of the Fresnel method for the characterisation of a short-period strained Ge/Si multilayer: I. Measurement of the average Ge/Si volume ratio. Ultramicroscopy 35:3-4, pages 197-215.
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X.J. Ning, P. Pirouz, M. Mehregany & W. Chu. (1991) Cross-sectional TEM studies of heavily boron-doped silicon. Cross-sectional TEM studies of heavily boron-doped silicon.

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