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Philosophical Magazine B Volume 63, 1991 - Issue 1
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Original Articles

On the structural, optical and electronic properties of microcrystalline Si:O:C:H thin films prepared in a two-consecutive-decomposition-deposition-chamber system

G. Willeke IMEC, Kapeldreef 75, B-3030 Leuven, Belgium; Faculty of Science and Technology, New University of Lisbon/UNINOVA, Portugal, Monte da Caparica; University of Konstanz, Faculty of Physics, LS Bucher, P.O. Box 5560, D-7750, Konstanz, F.R. Germany
&
R. Martins Faculty of Science and Technology, New University of Lisbon/UNINOVA, Portugal, Monte da Caparica
Pages 79-86 | Received 01 May 1990, Accepted 15 Jun 1990, Published online: 20 Aug 2006

Citations (14)

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Read on this site (2)

R. Martins, A. Maçarico, M. Vieira, I. Ferreira & E. Fortunato. (1997) Structure, composition and electro-optical properties of n-type amorphous and microcrystalline silicon thin films. Philosophical Magazine B 76:3, pages 249-258.
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F. Demichelis, C.F. Pirri & E. Tresso. (1992) Microcrystallization formation in silicon carbide thin films. Philosophical Magazine B 66:1, pages 135-146.
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Articles from other publishers (12)

U. Coscia, G. Ambrosone, D. K. Basa, E. Tresso, A. Chiodoni, N. Pinto & R. Murri. (2010) Morphological and structural modifications induced in a-Si1−x C x :H films by excimer laser annealing. Applied Physics A 100:4, pages 1163-1168.
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U. Coscia, G. Ambrosone, S. Lettieri, P. Maddalena, V. Rigato, S. Restello, E. Bobeico & M. Tucci. (2005) Preparation of microcrystalline silicon–carbon films. Solar Energy Materials and Solar Cells 87:1-4, pages 433-444.
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G Ambrosone, G Barucca, U Coscia, S Ferrero, S Lettieri & P Maddalena. (2004) Deposition of microcrystalline silicon–carbon alloys in low power regime. Journal of Non-Crystalline Solids 338-340, pages 163-167.
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U. Coscia, G. Ambrosone, C. Minarini, V. Parisi, S. Schutzmann, A. Tebano, S. Restello & V. Rigato. (2004) Laser annealing of hydrogenated amorphous silicon–carbon films. Thin Solid Films 453-454, pages 7-12.
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U. Coscia, G. Ambrosone, S. Lettieri, P. Maddalena, P. Rava & C. Minarini. (2003) Power density effects on the growth of microcrystalline silicon–carbon alloys by PECVD. Thin Solid Films 427:1-2, pages 284-288.
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R. Martins, I. Ferreira, E. Fortunato & M. Vieira. (2011) Silicon Oxycarbide Microcrystalline Layers Produced by Spatial Separation Techniques. MRS Proceedings 336.
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F. Demichelis, C. F. Pirri & E. Tresso. (1992) Influence of doping on the structural and optoelectronic properties of amorphous and microcrystalline silicon carbide. Journal of Applied Physics 72:4, pages 1327-1333.
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F. Demichelis, C.F. Pirri, E. Tresso, G. DellaMea, A. Quaranta, V. Rigato, M. Ferraris & P. Rava. (2011) Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.. MRS Proceedings 258.
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R. Martins, I. Ferreira, C. N. Carvalho, A. Maçarico & L. Guimarães. (2011) Engineering of PECVD Systems for Macroelectronic Applications. MRS Proceedings 258.
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F. Demichelis, C. F. Pirri, E. Tresso, L. Battezzati, E. Giamello & P. Menna. (2011) Crystallization Processes in Amorphous Hydrogenated Silicon Based Alloys. MRS Proceedings 230.
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F. Demichelis, C. F. Pirri, E. Tresso, G. Dellamea, V. Rigato & P. Rava. (2011) Physical Properties of Undoped and Doped Microcrystalline SiC:H Deposited by PECVD. MRS Proceedings 219.
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Roberto Balboni & Stefano Frabboni. (1991) CBED strain measurements in boron implanted silicon. Microscopy Microanalysis Microstructures 2:6, pages 617-626.
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