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Radiation Effects Volume 86, 1984 - Issue 4
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Original Articles

A comparison of three versions of sigmund's model of sputtering using experimental results

H. J. Strydom National Institute for Materials Research, CSIR, P.O. Box 395, Pretoria, 0001, South Africa
&
W. H. Gries National Institute for Materials Research, CSIR, P.O. Box 395, Pretoria, 0001, South Africa
Pages 145-151 | Received 07 Feb 1984, Published online: 19 Aug 2006

Citations (11)

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Read on this site (1)

JohanB. Malherbe. (1994) Sputtering of compound semiconductor surfaces. I. Ion-solid interactions and sputtering yields. Critical Reviews in Solid State and Materials Sciences 19:2, pages 55-127.
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Articles from other publishers (10)

Bernd RauschenbachBernd Rauschenbach. 2022. Low-Energy Ion Irradiation of Materials. Low-Energy Ion Irradiation of Materials 123 174 .
M. P. Seah, C. A. Clifford, F. M. Green & I. S. Gilmore. (2005) An accurate semi-empirical equation for sputtering yields I: for argon ions. Surface and Interface Analysis 37:5, pages 444-458.
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V.M. Konoplev, M. Vicanek & A. Gras-Martí. (1992) Note on the spectra of excited particles in sputtering from collision cascades. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 67:1-4, pages 574-579.
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L.F. Lifanova & R.U. Almuratov. (1991) Modification of coatings by low-energy argon ion bombardment during their growth and its influence on thermo-enhanced release of argon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 59-60, pages 241-244.
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B. Rauschenbach, K. Breuer & G. Leonhardt. (1990) Characterization of nitrogen-ion-implanted aluminium. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 47:4, pages 396-403.
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S.R. Bhattacharyya, D. Ghose & D. Basu. (1990) Mass and energy dependence of the sputtering yield of gallium arsenide. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 47:3, pages 253-256.
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Thomas Weber & Klaus-Peter Lieb. (1989) High fluence xenon irradiation of aluminium: Sputtering and saturation implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 44:1, pages 54-60.
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V.M. Konoplev. (1989) Influence of dose effects on depth distribution of implanted particles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 43:2, pages 159-161.
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B. ROCK, M. PARSONS & M. MANTENIEKS. (1985) Rapid evaluation of ion thruster lifetime using optical emission spectroscopy. Rapid evaluation of ion thruster lifetime using optical emission spectroscopy.
W. H. Gries & H. J. Strydom. (1984) A practical table of sputtering yields for the non-expert userEine Sputterkoeffiziententabelle f�r den Praktiker. Fresenius' Zeitschrift f�r Analytische Chemie 319:6-7, pages 727-728.
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