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Surface Engineering Volume 33, 2017 - Issue 8
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Original Articles

Characterisation of amorphous/nanocrystalline multilayer Si3N4–Si3N4/Si2N2O films prepared by alternately sputtering

Eryong LiuKey Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, ChinaCorrespondence[email protected]
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Jibin PuKey Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, ChinaView further author information
,
Zhixiang ZengKey Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, ChinaCorrespondence[email protected]
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,
Yongxin WangKey Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, ChinaView further author information
&
Wenjie ZhaoKey Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, ChinaView further author information
Pages 633-641 | Received 31 Oct 2016, Accepted 04 Feb 2017, Published online: 13 Mar 2017

Citations (3)

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Read on this site (1)

Satyajit Sarkar, Siddhartha Kumar Pradhan & M. Jeevitha. (2019) Factors influencing the nanostructure of obliquely deposited thin films. Surface Engineering 35:3, pages 227-233.
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Articles from other publishers (2)

Hae Jin Park, Young Seok Kim, Young Hoon Lee, Sung Hwan Hong, Kwang Sik Kim, Young Koon Park & Ki Buem Kim. (2021) Design of nano-scale multilayered nitride hard coatings deposited by arc ion plating process: Microstructural and mechanical characterization. Journal of Materials Research and Technology 15, pages 572-581.
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Eryong Liu, Bo Yu, Yuan Xue, Jibin Pu, Shuangming Du & Huiling Du. (2020) Microstructure and mechanical properties of a CrCN/Cr multilayer film. Materials Research Express 7:9, pages 096406.
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