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Surface Engineering Volume 37, 2021 - Issue 2: Special Issue: Properties
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Research Articles

Microstructure and properties of nanocrystalline Cu–Ta thin films prepared by direct current magnetron sputtering

Wu Tiana Institute of New Carbon Materials, Taiyuan University of Technology, Taiyuan City, People’s Republic of China;b School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo City, People’s Republic of ChinaView further author information
,
Jiaoyan Daib School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo City, People’s Republic of ChinaCorrespondence[email protected]
ORCID Iconhttps://orcid.org/0000-0002-4997-5496View further author information
ORCID Icon,
Lijun Zhangb School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo City, People’s Republic of China;c School of Materials Science and Engineering, Chang'an University, Xi’an City, People’s Republic of ChinaView further author information
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Yongqiang Changb School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo City, People’s Republic of China;d College of Mechanical Engineering, Taiyuan University of Technology, Taiyuan City, People’s Republic of ChinaView further author information
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Mingdong Baob School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo City, People’s Republic of ChinaView further author information
&
Shengwang Yua Institute of New Carbon Materials, Taiyuan University of Technology, Taiyuan City, People’s Republic of ChinaCorrespondence[email protected]
View further author information
Pages 160-168 | Received 27 Dec 2019, Accepted 19 Mar 2020, Published online: 10 Apr 2020

Citations (5)

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Read on this site (1)

Karan Pawar & Pradeep Dixit. (2022) A critical review of copper electroless deposition on glass substrates for microsystems packaging applications. Surface Engineering 38:6, pages 576-617.
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Articles from other publishers (4)

Kun Xia Wei, Shao Peng Wang, Wei Wei, Xu Long An, Dan Dan Wang & Igor V Alexandrov. (2023) High electrical conductivity of Cu wires cladded by Gr/Cu coating. Surface Innovations 11:1-3, pages 110-120.
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Min Huang, Yan-Song Liu, Zhi-Bing He & Yong Yi. (2022) Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering. Chinese Physics B 31:6, pages 066101.
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Xiao Wang, Mengjie Wang, Min Liu, Yue Liu & Weidong Wang. (2021) Atomic study on the deform mechanism of CuTa/Cu and CuTa/Ta nanolaminates. Atomic study on the deform mechanism of CuTa/Cu and CuTa/Ta nanolaminates.
Shuyi Wu, Xinkun Shen, Mengyu Chen, K. Hii Ru Yie, Zixin Zhou, Mohammed A. Al-Baadani, Kai Fang, Abdullrahman M. Al-Bishari, Zhennan Deng, Jinsong Liu & Lili Yao. (2021) Multifunctional TaCu-nanotubes coated titanium for enhanced bacteriostatic, angiogenic and osteogenic properties. Materials Science and Engineering: C 120, pages 111777.
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