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Aerosol Science and Technology Volume 5, 1986 - Issue 2
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Original Articles

A Gas Filtration System for Concentrations of 10 −5 Particles/cm3

G. Kasper Liquid Air Corporation, Chicago Research Center, Countryside, IL, 60525
&
H. Y. Wen Liquid Air Corporation, Chicago Research Center, Countryside, IL, 60525
Pages 167-185 | Received 30 Aug 1985, Accepted 28 Jan 1986, Published online: 06 Jun 2007

Citations (7)

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Read on this site (2)

Ravindran Periasamy, Fu-Lin Chen, DavidS. Ensor, RobertP. Donovan & Robert Denyszyn. (1990) Particles in High-Pressure Cylinder Gases. Aerosol Science and Technology 12:3, pages 762-776.
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WayneT. McDermott, Alexander Schwarz & RobertM. Thorogood. (1988) Large-Scale Filter Testing for High-Purity Gas Supply Systems Used in Semiconductor Processing. Aerosol Science and Technology 9:1, pages 1-14.
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Articles from other publishers (5)

Alvin LiebermanAlvin Lieberman. 1992. Contamination Control and Cleanrooms. Contamination Control and Cleanrooms 128 143 .
Hwa-Chi Wang & Gerhard Kasper. (1991) Filtration efficiency of nanometer-size aerosol particles. Journal of Aerosol Science 22:1, pages 31-41.
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Donald C. Grant & Benjamin Y. H. Liu. (1991) Sieving Capture of Liquidborne Particles by microporous membrane filtration media. Particle & Particle Systems Characterization 8:1-4, pages 142-150.
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H.Y. Wen & G. Kasper. (1989) On the kinetics of particle reentrainment from surfaces. Journal of Aerosol Science 20:4, pages 483-498.
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H.Y. Wen, G. Kasper & D. Montgomery. (1988) Nucleation of trace amounts of condensible vapors in an expanding gas jet. Journal of Aerosol Science 19:1, pages 153-156.
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