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Aerosol Science and Technology Volume 9, 1988 - Issue 3
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Original Articles

The Modified Chemical Vapor Deposition Process in a Concentric Annulus: An Extension for Focused High-Rate Deposition

M. Fiebig Institut für Thermo- und Fluiddynamik, Ruhr Universität Bochum, Bochum, Federal Republic of Germany, D-4630
,
M. Hilgenstock Institut für Thermo- und Fluiddynamik, Ruhr Universität Bochum, Bochum, Federal Republic of Germany, D-4630
&
H.-A. Riemann Institut für Thermo- und Fluiddynamik, Ruhr Universität Bochum, Bochum, Federal Republic of Germany, D-4630
Pages 237-249 | Received 21 Oct 1987, Accepted 01 Feb 1988, Published online: 07 Jun 2007

Citations (18)

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Mansoo Choi, Choonkeun Hong & Kong Hoon Lee. (2002) Jet Assisted Aerosol Chemical Vapor Deposition for Optical Fiber Synthesis. Aerosol Science and Technology 36:3, pages 300-307.
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Articles from other publishers (17)

Teodor Groşan, Mikhail A. Sheremet, Ioan Pop & Serban Rareş Pop. (2018) Double-Diffusive Natural Convection in a Differentially Heated Wavy Cavity Under Thermophoresis Effect. Journal of Thermophysics and Heat Transfer 32:4, pages 1045-1058.
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Samira Hashemi & Ataallah Soltani Goharrizi. (2009) Prediction of Thermophoretic Deposition Efficiency of Particles in a Laminar Gas Flow along a Concentric Annulus: A Comparison of Developing and Fully Developed Flows. Chinese Journal of Chemical Engineering 17:5, pages 727-733.
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T. Grosan, R. Pop & I. Pop. (2008) Thermophoretic deposition of particles in fully developed mixed convection flow in a parallel-plate vertical channel. Heat and Mass Transfer 45:4, pages 503-509.
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Byung Uk Lee, Du Sub Byun, Gwi-Nam Bae & Jin-Ha Lee. (2006) Thermophoretic deposition of ultrafine particles in a turbulent pipe flow: Simulation of ultrafine particle behaviour in an automobile exhaust pipe. Journal of Aerosol Science 37:12, pages 1788-1796.
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C. Hong, D. S. Kim & M. Choi. (2006) Jet-Assisted Aerosol CVD for Multicomponent Particle Deposition. Chemical Vapor Deposition 12:10, pages 627-630.
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Reiyu Chein & Wenyuan Liao. (2005) Thermophoretic effects on nano-particle deposition in channel flow. Heat and Mass Transfer 42:1, pages 71-79.
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Byung Uk Lee & Sang Soo Kim. (2001) Thermophoresis in the cryogenic temperature range. Journal of Aerosol Science 32:1, pages 107-119.
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K.S. Park, M. Choi & J.D. Chung. (2000) Unsteady heat and mass transfer on the codeposition of SiO2/GeO2 during the modified chemical vapor deposition process. International Journal of Heat and Mass Transfer 43:17, pages 3209-3217.
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M. C. Chiou. (2000) Submicron particle deposition from a laminar boundary-layer flow onto an isothermal vertical solid plate. Acta Mechanica 143:3-4, pages 229-253.
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K. S. Park & M. Choi. (1998) Analysis of Unsteady Heat and Mass Transfer During the Modified Chemical Vapor Deposition Process. Journal of Heat Transfer 120:4, pages 858-864.
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M. C. Chiou. (1998) Particle deposition from natural convection boundary layer flow onto an isothermal vertical cylinder. Acta Mechanica 129:3-4, pages 163-176.
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M.C. Chiou & J.W. Cleaver. (1996) Effect of thermophoresis on sub-micron particle deposition from a laminar forced convection boundary layer flow onto an isothermal cylinder. Journal of Aerosol Science 27:8, pages 1155-1167.
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S. Joh & R. Greif. (1995) The effects of SiCl4 and GeCl4 oxidation, variable properties, buoyancy and tube rotation on the modified chemical vapor deposition process. International Journal of Heat and Mass Transfer 38:10, pages 1911-1921.
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Yu-Chen Chang, M.B.(Arun) Ranade & J.W. Gentry. (1995) Thermophoretic deposition in flow along an annular cross-section: Experiment and simulation. Journal of Aerosol Science 26:3, pages 407-428.
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Y. T. Lin, M. Choi & R. Greif. (1993) An analysis of the effect of the solid layer for the modified chemical vapor deposition processUntersuchung des Einflusses der Feststoffschicht auf den modifizierten chemischen Aufdampfprozeß. Wärme- und Stoffübertragung 28:4, pages 169-176.
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Kyo-Seon Kim & Sotiris E. Pratsinis. (1990) Codeposition of SiO2/GeO2 during production of optical fiber preforms by modified chemical vapor deposition. International Journal of Heat and Mass Transfer 33:9, pages 1977-1986.
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Dimitrios I. Fotiadis & Klavs F. Jensen. (1990) Thermophoresis of solid particles in horizontal chemical vapor deposition reactors. Journal of Crystal Growth 102:4, pages 743-761.
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