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IETE Journal of Research Volume 49, 2003 - Issue 6
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Original Articles

Polysilicon Piezoresistive Pressure Sensors based on MEMS Technology

J AkhtarMicroelectronics Technology Group, Central Electronics Engineering Research Institute, Pilani333 031, India. e-mail: [email protected]; [email protected]View further author information
, MIETE,
B B DixitMicroelectronics Technology Group, Central Electronics Engineering Research Institute, Pilani333 031, India. e-mail: [email protected]; [email protected]
, FIETE,
B D PantMicroelectronics Technology Group, Central Electronics Engineering Research Institute, Pilani333 031, India. e-mail: [email protected]; [email protected]View further author information
, FIETE &
V P DeshwalMicroelectronics Technology Group, Central Electronics Engineering Research Institute, Pilani333 031, India. e-mail: [email protected]; [email protected]View further author information
, FIETE
Pages 365-377 | Published online: 26 Mar 2015

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Monica Lamba, Himanshu Chaudhary & Kulwant Singh. (2022) Optimized Analysis of Sensitivity and Non-Linearity for PDMS–Graphene MEMS Force Sensor. IETE Journal of Research 68:6, pages 4453-4467.
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P. V. Kasambe, Kiran S. Bhole, A. A. Bage, N. R. Raykar & D. V. Bhoir. (2022) Analytical modeling and numerical investigation of a variable width piezoresistive multilayer polymer micro-cantilever air flow sensor. Advances in Materials and Processing Technologies 8:4, pages 4365-4383.
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Vinod Belwanshi & Anita Topkar. (2022) Quantitative Analysis of MEMS Piezoresistive Pressure Sensors Based on Wide Band Gap Materials. IETE Journal of Research 68:1, pages 667-677.
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Pradipta Roy, Debarati Dey & Debashis De. (2022) Computational Investigation of Quantum Transport to Design Single-Strand DNA Logic Gate Using Silicon Carbide Nanotube Electrode. IETE Journal of Research 68:1, pages 299-307.
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Articles from other publishers (14)

S. Ananthi, Monica Lamba, Himanshu Chaudhary & Kulwant Singh. 2023. Flexible Electronics for Electric Vehicles. Flexible Electronics for Electric Vehicles 151 159 .
Vinod Belwanshi, Sebin Philip & Anita Topkar. (2022) Performance Study of MEMS Piezoresistive Pressure Sensors at Elevated Temperatures. IEEE Sensors Journal 22:10, pages 9313-9320.
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Vinod Belwanshi. (2020) Analytical modeling to estimate the sensitivity of MEMS technology-based piezoresistive pressure sensor. Journal of Computational Electronics 20:1, pages 668-680.
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Meetu Nag, Ajay Kumar & Bhanu Pratap. (2021) A novel graphene pressure sensor with zig–zag shaped piezoresistors for maximum strain coverage for enhancing the sensitivity of the pressure sensor. International Journal for Simulation and Multidisciplinary Design Optimization 12, pages 14.
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Gaffar Hossain, Ishtia Zahir Hossain & Günter Grabher. (2020) Piezoresistive smart-textile sensor for inventory management record. Sensors and Actuators A: Physical 315, pages 112300.
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Samridhi, Manish Kumar, Sachin Dhariwal, Kulwant Singh & P. A. Alvi. (2019) Stress and frequency analysis of silicon diaphragm of MEMS based piezoresistive pressure sensor. International Journal of Modern Physics B 33:07, pages 1950040.
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Kulwant Singh, Robin Joyce, Soney Varghese & J. Akhtar. (2015) Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor. Sensors and Actuators A: Physical 223, pages 151-158.
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Kulwant Singh, Soney Varghese & Jamil Akhtar. (2015) Ultra uniform arrays of micro patterns on large area substrate by employing wet chemical etching. Materials Science in Semiconductor Processing 31, pages 351-357.
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Robin Joyce, Kulwant Singh, Soney Varghese & Jamil Akhtar. (2014) Stress reduction in silicon/oxidized silicon–Pyrex glass anodic bonding for MEMS device packaging: RF switches and pressure sensors. Journal of Materials Science: Materials in Electronics 26:1, pages 411-423.
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X. Q. Jiao, R. Zhang, J. Yang, H. Zhong, Y. Shi, X. Y. Chen & J. Shi. (2013) Characterizations of evaporated α-Si thin films for MEMS application. Applied Physics A 116:2, pages 621-627.
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Kulwant Singh, Sualeh Akhtar, Soney Varghese & J. Akhtar. 2014. Physics of Semiconductor Devices. Physics of Semiconductor Devices 449 451 .
Sheba Jamil, Sanjeev K. Gupta, K. Anbalagan & J. Akhtar. (2011) Electron-beam assisted physical vapor deposition of polycrystalline silicon films. Materials Science in Semiconductor Processing 14:3-4, pages 287-293.
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Kulwant Singh, Sanjeev K. Gupta, Amir Azam & J. Akhtar. (2009) A wet‐etch method with improved yield for realizing polysilicon resistors in batch fabrication of MEMS pressure sensor. Sensor Review 29:3, pages 260-265.
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J. Akhtar, B.B. Dixit, B.D. Pant, V.P. Deshwal & B.C. Joshi. (2003) A process to control diaphragm thickness with a provision for back to front alignment in the fabrication of polysilicon piezoresistive pressure sensor. Sensor Review 23:4, pages 311-315.
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