86
Views
2
CrossRef citations to date
0
Altmetric
Original Articles

Constrained Optimum Design of 3-DOF Microaccelerometers

, , &

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (1)

S. Vetrivel, B. Anupama Menon, Ribu Mathew & A. Ravi Sankar. (2022) Influence of the Flexure Position and a Thick Gold Film on the Performance of Beam-Mass Structures. IETE Journal of Research 68:1, pages 690-702.
Read now

Articles from other publishers (1)

Norliana Yusof, Badariah Bais, Norhayati Soin & Burhanuddin Yeop Majlis. (2021) Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method. Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.