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Tribology Transactions Volume 47, 2004 - Issue 2
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Original Articles

Micro/Nanotribological and Mechanical Studies of TiN Thin-Film for MEMS Applications

Xiankun Cao State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
,
Tianmin Shao State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
,
Shizhu Wen State Key Laboratory of Tribology Tsinghua University, Beijing, China, 100084
&
Yuan Yao Department of Materials Physics University of Science and Technology Beijing, Beijing, China, 100083
Pages 227-232 | Published online: 12 Aug 2010

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Levent Kara, Doğuş Özkan, M. Barış Yağcı, Egemen Sulukan, Yaşar Sert & Tugay Sonsuz Sert. (2019) Friction and Wear Behaviors of TiN Coatings under Dry and Vacuum Conditions. Tribology Transactions 62:3, pages 362-373.
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Dae-Hyun Cho, Jiusi Jia & Young-Ze Lee. (2015) Effects of Oxide Layer Formation during Lubricated Sliding on the Frictional Properties of Titanium-Coated Silicon. Tribology Transactions 58:1, pages 44-50.
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Abhishek Chatterjee, Navneet Kumar, JohnR. Abelson, Pascal Bellon & AndreasA. Polycarpou. (2010) Nanowear of Hafnium Diboride Thin Films. Tribology Transactions 53:5, pages 731-738.
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Articles from other publishers (10)

L. Galinovskii, A. S. Provatorov, S. A. Velichko, O. V. Barmina & T. N. Borovik. (2023) Friction and Ultrajet Tests of Functional Coatings. Journal of Machinery Manufacture and Reliability 51:8, pages 864-871.
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Yunfeng Wang, Yongjun Li, Guizhi Wu & Zhibin Lu. (2022) Friction reduction mechanisms of TiN film sliding in graphene aqueous dispersion . Lubrication Science 34:2, pages 112-126.
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R.C. Morón, G.A. Rodríguez-Castro, D.V. Melo-Máximo, J. Oseguera, A. Bahrami, S. Muhl & I. Arzate-Vázquez. (2019) Multipass and reciprocating microwear study of TiN based films. Surface and Coatings Technology 375, pages 793-801.
Crossref
Mohamed Abd Al-Samieh. (2017) Demarcation boundary between region dominated by elastohydrodynamic lubrication and that by the surface force action for different elliptical ratios. Industrial Lubrication and Tribology 69:2, pages 215-224.
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K. Yalamanchili, E. Jiménez-Piqué, L. Pelcastre, K.D. Bakoglidis, J.J. Roa, M.P. Johansson Jöesaar, B. Prakash, N. Ghafoor & M. Odén. (2016) Influence of microstructure and mechanical properties on the tribological behavior of reactive arc deposited Zr-Si-N coatings at room and high temperature. Surface and Coatings Technology 304, pages 393-400.
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D. Dinesh Kumar, N. Kumar, S. Kalaiselvam, S. Dash & R. Jayavel. (2015) Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications. Tribology International 88, pages 25-30.
Crossref
Kyriaki Polychronopoulou, Jungkyu Lee, Christos Tsotsos, Nicholaos G. Demas, Ryan L. Meschewski, Claus Rebholz & Andreas A. Polycarpou. (2011) Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications. Tribology Letters 44:2, pages 213-221.
Crossref
Seong H. Kim, David B. Asay & Michael T. Dugger. (2007) Nanotribology and MEMS. Nano Today 2:5, pages 22-29.
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Sedao, Tianmin Shao, Huiqing Mou & Meng Hua. (2005) Preparation of AlCuFe quasicrystalline film by pulsed laser-arc deposition. Thin Solid Films 483:1-2, pages 1-5.
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Hideaki Nishida, Toshikazu Hayashi, Noriyuki Hayashi, Atsushi Yuge, Akihiko Matsui & Yoshimi Kagimoto. 2005. Life Cycle Tribology. Life Cycle Tribology 789 798 .

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