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Original Articles

Shift scheduling for steppers in the semiconductor wafer fabrication process

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Pages 167-177 | Received 01 Nov 1999, Accepted 01 May 2001, Published online: 17 Apr 2007

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B. Lee, Y. H. Lee, T. Yang & J. Ignisio. (2008) A due-date based production control policy using WIP balance for implementation in semiconductor fabrications. International Journal of Production Research 46:20, pages 5515-5529.
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E. Cakici & S. J. Mason. (2007) Parallel machine scheduling subject to auxiliary resource constraints. Production Planning & Control 18:3, pages 217-225.
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Kyung Hwan Kang & Young Hoon Lee. (2007) Make-to-order scheduling in foundry semiconductor fabrication. International Journal of Production Research 45:3, pages 615-630.
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Ensieh Ghaedy-Heidary, Erfan Nejati, Amir Ghasemi & S. Ali Torabi. (2024) A simulation optimization framework to solve Stochastic Flexible Job-Shop Scheduling Problems—Case: Semiconductor manufacturing. Computers & Operations Research 163, pages 106508.
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Evans Sowah Okpoti & In-Jae Jeong. (2021) A reactive decentralized coordination algorithm for event-driven production planning and control: A cyber-physical production system prototype case study. Journal of Manufacturing Systems 58, pages 143-158.
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Kan Wu & Yichi Shen. (2020) A unified view on planning, scheduling and dispatching for a factory. Advanced Engineering Informatics 46, pages 101188.
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Shiladitya Chakravorty & Nagendra N. Nagarur. (2020) An Artificial Neural Network Based Algorithm For Real Time Dispatching Decisions. An Artificial Neural Network Based Algorithm For Real Time Dispatching Decisions.
Jianwen Yan, Kexin Zhang, Weiwei Zhu & Yu Fan. (2019) An empirical framework for soft CSFs of TQM in Chinese manufacturing companies. The TQM Journal 31:3, pages 377-399.
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Shiladitya Chakravorty & Atirek Wribhu. (2019) Throughput Optimization of Fast Processing Tools Using a Dispatching Algorithm. Throughput Optimization of Fast Processing Tools Using a Dispatching Algorithm.
Peng Zhang, Xinming Zhao, Xia Sheng & Jie Zhang. (2018) An Imperialist Competitive Algorithm Incorporating Remaining Cycle Time Prediction for Photolithography Machines Scheduling. IEEE Access 6, pages 66787-66797.
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Hang-Min Cho & In-Jae Jeong. (2017) A two-level method of production planning and scheduling for bi-objective reentrant hybrid flow shops. Computers & Industrial Engineering 106, pages 174-181.
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Sun Hoon Kim & Young Hoon Lee. (2016) Synchronized production planning and scheduling in semiconductor fabrication. Computers & Industrial Engineering 96, pages 72-85.
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Yael Perlman, Elad Crispil & Adar Kalir. (2015) Production Planning and WIP Assignment for Wafer Fabrication Tools With Availability Constraints. IEEE Transactions on Semiconductor Manufacturing 28:3, pages 385-392.
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Rosemary R. Fullerton, Frances A. Kennedy & Sally K. Widener. (2014) Lean manufacturing and firm performance: The incremental contribution of lean management accounting practices. Journal of Operations Management 32:7-8, pages 414-428.
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Andreas Klemmt, Jan Lange, Gerald Weigert, Frank Lehmann & Jens Seyfert. (2010) A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing. A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing.
Jaewoo Chung & Jaejin Jang. (2009) A WIP Balancing Procedure for Throughput Maximization in Semiconductor Fabrication. IEEE Transactions on Semiconductor Manufacturing 22:3, pages 381-390.
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Zhang Huai, Jiang Zhibin, Lee Yen-Fei, Ko Chen-Pin, Luke Choo Ooi Tuck & Lim Lee Phing. (2007) An approach of dynamic bottleneck machine dispatching for semiconductor wafer fab. An approach of dynamic bottleneck machine dispatching for semiconductor wafer fab.
Yang Sun, Andrew Feller, Dan Shunk, John Fowler, Thomas Callarman & Brett Duarte. (2007) Decision Paradigms in the Semiconductor Supply Chain: A Survey and Analysis. Decision Paradigms in the Semiconductor Supply Chain: A Survey and Analysis.
Ismail Sila. (2007) Examining the effects of contextual factors on TQM and performance through the lens of organizational theories: An empirical study. Journal of Operations Management 25:1, pages 83-109.
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Elif Akçalı, Alper Üngör & Reha Uzsoy. (2005) Short‐term capacity allocation problem with tool and setup constraints. Naval Research Logistics (NRL) 52:8, pages 754-764.
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Ismail Sila & Maling Ebrahimpour. (2005) Critical linkages among TQM factors and business results. International Journal of Operations & Production Management 25:11, pages 1123-1155.
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D. Delp, J. Si, Y. Hwang & B. Pei. (2005) A systematic study of the extended X-factor in relation to effective system capacity. Journal of Manufacturing Systems 24:4, pages 289-301.
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