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IIE Transactions Volume 39, 2007 - Issue 3
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ORIGINAL ARTICLES

Variable EWMA run-to-run controller for drifted processes

Sheng-Tsaing Tseng Institute of Statistics, National Tsing Hua University, Hsin-Chu, Taiwan, ROC
,
Fugee Tsung Department of Industrial Engineering and Logistics Management, Hong Kong University of Science and Technology, Kowloon, Hong Kong
&
Pei-Yun Liu Institute of Statistics, National Tsing Hua University, Hsin-Chu, Taiwan, ROC
Pages 291-301 | Received 01 May 2005, Accepted 01 Oct 2005, Published online: 23 Feb 2007

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Xiaonan Liu, Andrew M. Gough & Jing Li. (2018) Semiconductor corner lot generation robust to process variation: Modeling and analysis. IISE Transactions 50:2, pages 126-139.
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Fangyi He, Huiliang Xie & Kaibo Wang. (2015) Optimal setup adjustment and control of a process under ARMA disturbances. IIE Transactions 47:3, pages 230-244.
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Sheng-tsaing Tseng & Hsin-chao Mi. (2014) Quasi-minimum mean square error run-to-run controller for dynamic models. IIE Transactions 46:2, pages 185-196.
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Kaibo Wang & Jing Lin. (2013) A run-to-run control algorithm based on timely and delayed mixed-resolution information. International Journal of Production Research 51:15, pages 4704-4717.
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Kaibo Wang & Kai Han. (2013) A batch-based run-to-run process control scheme for semiconductor manufacturing. IIE Transactions 45:6, pages 658-669.
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Chien-Hua Lin, Sheng-Tsaing Tseng & Hsiang-Fan Wang. (2013) Modified EWMA controller subject to metrology delay. IIE Transactions 45:4, pages 409-421.
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Jing Lin & Kaibo Wang. (2012) A Bayesian framework for online parameter estimation and process adjustment using categorical observations. IIE Transactions 44:4, pages 291-300.
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Jing Lin & Kaibo Wang. (2011) Online parameter estimation and run-to-run process adjustment using categorical observations. International Journal of Production Research 49:13, pages 4103-4117.
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Sheng-Tsaing Tseng, Bo-Yan Jou & Chuan-Hao Liao. (2010) Adaptive variable EWMA controller for drifted processes. IIE Transactions 42:4, pages 247-259.
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Articles from other publishers (11)

Delin Huang & Jun Lv. (2020) Run-to-run control of batch production process in manufacturing systems based on online measurement. Computers & Industrial Engineering 141, pages 106298.
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Zhao Xu, Changhua Hu & Jinwen Hu. (2019) Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Science China Information Sciences 62:8.
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Xin Wang, Su Wu & Kaibo Wang. (2015) A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products. IEEE Transactions on Automation Science and Engineering 12:1, pages 192-203.
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Qingsong Gong, Genke Yang & Changchun Pan. (2014) A study of MEWMA controller for drifted MIMO non-squared process. A study of MEWMA controller for drifted MIMO non-squared process.
Kai Han & Kaibo Wang. (2013) Coordination and control of batch-based multistage processes. Journal of Manufacturing Systems 32:2, pages 372-381.
Crossref
Bo-Yan Jou, Ya-Ting Chan & Sheng-Tsaing Tseng. (2012) Designing a Variable EWMA Controller for Process Disturbance Subject to Linear Drift and Step Changes. IEEE Transactions on Semiconductor Manufacturing 25:4, pages 614-622.
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Yan Su, Lianjie Shu & Kwok-Leung Tsui. (2011) Adaptive EWMA procedures for monitoring processes subject to linear drifts. Computational Statistics & Data Analysis 55:10, pages 2819-2829.
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Bing Ai, Ying Zheng, Yanwei Wang, Shi-Shang Jang & Tao Song. (2010) Cycle forecasting EWMA (CF-EWMA) approach for drift and fault in mixed-product run-to-run process. Journal of Process Control 20:5, pages 689-708.
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Bing Ai, Ying Zheng, Shi-Shang Jang, Yanwei Wang, Lin Ye & Chunjie Zhou. (2009) The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control. Journal of Process Control 19:8, pages 1401-1412.
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Yanfen Shang, Kaibo Wang & Fugee Tsung. (2008) An improved run‐to‐run process control scheme for categorical observations with misclassification errors. Quality and Reliability Engineering International 25:4, pages 397-407.
Crossref
Christina Mastrangelo & Naveen Kumar. 2007. Encyclopedia of Statistics in Quality and Reliability. Encyclopedia of Statistics in Quality and Reliability.

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