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IIE Transactions Volume 40, 2007 - Issue 2
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ORIGINAL ARTICLES

A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication

Tao Yuan Department of Industrial and Information Engineering, The University of Tennessee, Knoxville, Knoxville, TN, 37996, USA
&
Way Kuo Department of Industrial and Information Engineering, The University of Tennessee, Knoxville, Knoxville, TN, 37996, USA
Pages 93-101 | Received 01 Aug 2006, Accepted 01 Apr 2007, Published online: 14 Dec 2007

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Xiaonan Liu, Andrew M. Gough & Jing Li. (2018) Semiconductor corner lot generation robust to process variation: Modeling and analysis. IISE Transactions 50:2, pages 126-139.
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Gyunghyun Choi, Sung-Hee Kim, Chunghun Ha & Suk Joo Bae. (2012) Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers. International Journal of Production Research 50:12, pages 3274-3287.
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Articles from other publishers (36)

Dong-Hee Lee, Eun-Su Kim, Seung-Hyun Choi, Young-Mok Bae, Jong-Bum Park, Young-Chan Oh & Kwang-Jae Kim. (2023) Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods. Computers in Industry 152, pages 104005.
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Xiang Wang, Zhiwei Shao, Yancen Shen & Yanfeng He. (2023) Research on fast marking method for indicator diagram of pumping well based on K-means clustering. Heliyon 9:10, pages e20468.
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Rui Wang & Nan Chen. (2022) Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting. IEEE Transactions on Semiconductor Manufacturing 35:3, pages 485-494.
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Jiantao Chang, Zixuan Qiao, Qibin Wang, Xianguang Kong & Yunsong Yuan. (2022) Investigation on SMT Product Defect Recognition Based on Multi-Source and Multi-Dimensional Data Reconstruction. Micromachines 13:6, pages 860.
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Yuxiang Wei & Huan Wang. (2022) Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer. IEEE Transactions on Semiconductor Manufacturing 35:2, pages 341-352.
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Jianbo Yu & Jiatong Liu. (2022) Multiple Granularities Generative Adversarial Network for Recognition of Wafer Map Defects. IEEE Transactions on Industrial Informatics 18:3, pages 1674-1683.
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Chia-Yu Hsu & Ju-Chien Chien. (2020) Ensemble convolutional neural networks with weighted majority for wafer bin map pattern classification. Journal of Intelligent Manufacturing 33:3, pages 831-844.
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Abd Al Rahman M. Abu Ebayyeh, Sebelan Danishvar & Alireza Mousavi. (2022) An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling. IEEE Transactions on Semiconductor Manufacturing 35:1, pages 50-59.
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Shuyu Wang, Zhitao Zhong, Yuliang Zhao & Lei Zuo. (2021) A Variational Autoencoder Enhanced Deep Learning Model for Wafer Defect Imbalanced Classification. IEEE Transactions on Components, Packaging and Manufacturing Technology 11:12, pages 2055-2060.
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Donghwa Kim & Pilsung Kang. (2021) Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders. IEEE Transactions on Semiconductor Manufacturing 34:4, pages 444-454.
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Jianbo Yu & Jiatong Liu. (2021) Two-Dimensional Principal Component Analysis-Based Convolutional Autoencoder for Wafer Map Defect Detection. IEEE Transactions on Industrial Electronics 68:9, pages 8789-8797.
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Jianbo Yu, Zongli Shen & Xiaoyun Zheng. (2021) Joint Feature and Label Adversarial Network for Wafer Map Defect Recognition. IEEE Transactions on Automation Science and Engineering 18:3, pages 1341-1353.
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Ahmed Aziz Ezzat, Sheng Liu, Dorit S. Hochbaum & Yu Ding. (2021) A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps. IEEE Transactions on Semiconductor Manufacturing 34:2, pages 194-206.
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Yuting Kong & Dong Ni. (2020) Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps. IEEE Transactions on Semiconductor Manufacturing 33:4, pages 578-586.
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Tülin İnkaya, Sinan Kayalıgil & Nur Evin Özdemirel. (2019) Extracting the Boundaries of Clusters: A Post-Clustering Tool for Spatial Datasets. International Journal of Pattern Recognition and Artificial Intelligence 34:04, pages 2050008.
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Abd Al Rahman M. Abu Ebayyeh & Alireza Mousavi. (2020) A Review and Analysis of Automatic Optical Inspection and Quality Monitoring Methods in Electronics Industry. IEEE Access 8, pages 183192-183271.
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Jing Yang, Yi Xu, Hai-Jun Rong, Shaoyi Du & Hongmei Zhang. (2020) A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm. IEEE Access 8, pages 79056-79068.
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Jianbo Yu. (2019) Enhanced Stacked Denoising Autoencoder-Based Feature Learning for Recognition of Wafer Map Defects. IEEE Transactions on Semiconductor Manufacturing 32:4, pages 613-624.
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Yanfen Shang, Tao Li, Lisha Song & Zhiqiong Wang. (2019) Control charts for monitoring two-dimensional spatial count data with spatial correlations. Computers & Industrial Engineering 137, pages 106043.
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Yuting Kong & Dong Ni. (2019) Recognition and Location of Mixed-type Patterns in Wafer Bin Maps. Recognition and Location of Mixed-type Patterns in Wafer Bin Maps.
Hongyu Hou & Feng Wu. (2019) Comparison research on X-ray image quality defects detection algorithm in semiconductor manufacturing. Comparison research on X-ray image quality defects detection algorithm in semiconductor manufacturing.
Yefan Zhou. (2019) Research on Image-Based Automatic Wafer Surface Defect Detection Algorithm. Journal of Image and Graphics 7:1, pages 26-31.
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Ghalia Tello, Omar Y. Al-Jarrah, Paul D. Yoo, Yousof Al-Hammadi, Sami Muhaidat & Uihyoung Lee. (2018) Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes. IEEE Transactions on Semiconductor Manufacturing 31:2, pages 315-322.
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Mohammad Shehab, Ahamad Tajudin Khader & Mohammed Azmi Al-Betar. (2017) A survey on applications and variants of the cuckoo search algorithm. Applied Soft Computing 61, pages 1041-1059.
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Mengying Fan, Qin Wang & Ben van der Waal. (2016) Wafer defect patterns recognition based on OPTICS and multi-label classification. Wafer defect patterns recognition based on OPTICS and multi-label classification.
Jianbo Yu & Xiaolei Lu. (2016) Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Linear Discriminant Analysis. IEEE Transactions on Semiconductor Manufacturing 29:1, pages 33-43.
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Tülin İnkaya, Sinan Kayalıgil & Nur Evin Özdemirel. (2015) Ant Colony Optimization based clustering methodology. Applied Soft Computing 28, pages 301-311.
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Yuhang Liu & Shiyu Zhou. (2015) Detecting Point Pattern of Multiple Line Segments Using Hough Transformation. IEEE Transactions on Semiconductor Manufacturing 28:1, pages 13-24.
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Ming-Ju Wu, Jyh-Shing R. Jang & Jui-Long Chen. (2015) Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets. IEEE Transactions on Semiconductor Manufacturing 28:1, pages 1-12.
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Robert C. Qiu, Zhen Hu, Husheng Li & Michael C. Wicks. 2012. Cognitive Radio Communications and Networking. Cognitive Radio Communications and Networking 453 510 .
Q. Zhou, L. Zeng, M. DeCicco, X. Li & S. Zhou. (2012) A comparative study on clustering indices for distribution uniformity of nanoparticles in metal matrix nanocomposites. CIRP Journal of Manufacturing Science and Technology 5:4, pages 348-356.
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Tao Yuan, Saleem Z. Ramadan & Suk Joo Bae. (2011) Yield Prediction for Integrated Circuits Manufacturing Through Hierarchical Bayesian Modeling of Spatial Defects. IEEE Transactions on Reliability 60:4, pages 729-741.
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Tao Yuan, Way Kuo & Suk Joo Bae. (2011) Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes. IEEE Transactions on Semiconductor Manufacturing 24:3, pages 392-403.
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Tao Yuan, Suk Joo Bae & Jong In Park. (2010) Bayesian spatial defect pattern recognition in semiconductor fabrication using support vector clustering. The International Journal of Advanced Manufacturing Technology 51:5-8, pages 671-683.
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Qiang Zhou, Li Zeng & Shiyu Zhou. (2010) Statistical Detection of Defect Patterns Using Hough Transform. IEEE Transactions on Semiconductor Manufacturing 23:3, pages 370-380.
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K. Preston White,Bijoy Kundu & Christina M. Mastrangelo. (2008) Classification of Defect Clusters on Semiconductor Wafers Via the Hough Transformation. IEEE Transactions on Semiconductor Manufacturing 21:2, pages 272-278.
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