34
Views
42
CrossRef citations to date
0
Altmetric
Scheduling & Logistics

CONTROL OF MULTIPRODUCT BULK SERVICE DIFFUSION/OXIDATION PROCESSES

, &
Pages 84-96 | Published online: 31 May 2007

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (16)

Wenyou Jia, Hao Chen, Li Liu, Zhibin Jiang & You Li. (2017) Full-batch-oriented scheduling algorithm on batch processing workstation of β→β type with re-entrant flow. International Journal of Computer Integrated Manufacturing 30:10, pages 1029-1042.
Read now
Federico Trigos & Eduardo Manuel López. (2017) A vulcanising decision planning as a particular one-dimensional cutting stock problem with limited part-related tooling in make-to-order industrial environments. International Journal of Production Research 55:10, pages 2881-2896.
Read now
Wenyou Jia, Zhibin Jiang & You Li. (2013) Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals. International Journal of Production Research 51:15, pages 4570-4584.
Read now
Myoungsoo Ham, Young Hoon Lee & Sun Hoon Kim. (2011) Real-time scheduling of multi-stage flexible job shop floor. International Journal of Production Research 49:12, pages 3715-3730.
Read now
Subhash C. Sarin, Amrusha Varadarajan & Lixin Wang. (2011) A survey of dispatching rules for operational control in wafer fabrication. Production Planning & Control 22:1, pages 4-24.
Read now
Durk-Jouke van der Zee. (2010) Non-exhaustive family based dispatching heuristics–exploiting variances of processing and set-up times. International Journal of Production Research 48:13, pages 3783-3802.
Read now
Seok Ho Chang & StanleyB. Gershwin. (2010) Modeling and analysis of two unreliable batch machines with a finite buffer in between. IIE Transactions 42:6, pages 405-421.
Read now
D. J. Van Der Zee. (2007) Dynamic scheduling of batch-processing machines with non-identical product sizes. International Journal of Production Research 45:10, pages 2327-2349.
Read now
D. J. Van Der Zee . (2004) Dynamic scheduling of batch servers with compatible product families. International Journal of Production Research 42:22, pages 4803-4826.
Read now
D. J. Van Der Zee. (2002) Adaptive scheduling of batch servers in flow shops. International Journal of Production Research 40:12, pages 2811-2833.
Read now
DURK-JOUKE VAN DER ZEE, AART VAN HARTEN & PETER SCHUUR. (2001) On-line scheduling of multi-server batch operations. IIE Transactions 33:7, pages 569-586.
Read now
JOHNW. FOWLER, GARYL. HOGG & DONT. PHILLIPS. (2000) Control of multiproduct bulk server diffusion/oxidation processes. Part 2: multiple servers. IIE Transactions 32:2, pages 167-176.
Read now
I. M. OVACIK & R. UZSOY. (1995) Rolling horizon procedures for dynamic parallel machine scheduling with sequence-dependent setup times. International Journal of Production Research 33:11, pages 3173-3192.
Read now
J. K. ROBINSON, J. W. FOWLER & J. F. BARD. (1995) The use of upstream and downstream information in scheduling semiconductor batch operations. International Journal of Production Research 33:7, pages 1849-1869.
Read now
R. UZSOY. (1994) Scheduling a single batch processing machine with non-identical job sizes. International Journal of Production Research 32:7, pages 1615-1635.
Read now
I. M. OVACIKT & R. UZSOY. (1994) Rolling horizon algorithms for a single-machine dynamic scheduling problem with sequence-dependent setup times. International Journal of Production Research 32:6, pages 1243-1263.
Read now

Articles from other publishers (26)

Andreas Klemmt, Jens Kutschke & Christian Schubert. (2017) From dispatching to scheduling: Challenges in integrating a generic optimization platform into semiconductor shop floor execution. From dispatching to scheduling: Challenges in integrating a generic optimization platform into semiconductor shop floor execution.
Yong H Chung, Jeong C Seo, Chong Man Kim, Byung H Kim & Sang C Park. (2016) Reservation-based dispatching rule for make-to-order wafer FAB with high-priority lots. Concurrent Engineering 25:1, pages 68-80.
Crossref
Shubin Xu & James C. Bean. (2015) Scheduling parallel-machine batch operations to maximize on-time delivery performance. Journal of Scheduling 19:5, pages 583-600.
Crossref
Ci Chen, Beixin Xia, Bing-hai Zhou & Lifeng Xi. (2013) A reinforcement learning based approach for a multiple-load carrier scheduling problem. Journal of Intelligent Manufacturing 26:6, pages 1233-1245.
Crossref
Abdullah Çerekçi & Amarnath Banerjee. (2015) Effect of upstream re-sequencing in controlling cycle time performance of batch processors. Computers & Industrial Engineering 88, pages 206-216.
Crossref
Remco Germs & Nicky van Foreest. (2012) Analysis of finite-buffer state-dependent bulk queues. OR Spectrum 35:3, pages 563-583.
Crossref
June-Young Bang, Yeong-Dae Kim & Seong-Woo Choi. (2012) Multiproduct Lot Merging–Splitting Algorithms for Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing 25:2, pages 200-210.
Crossref
Yeong-Dae Kim, Jae-Hun Kang, Gyeong-Eun Lee & Seung-Kil Lim. (2011) Scheduling Algorithms for Minimizing Tardiness of Orders at the Burn-in Workstation in a Semiconductor Manufacturing System. IEEE Transactions on Semiconductor Manufacturing 24:1, pages 14-26.
Crossref
Myoungsoo Ham, Young Hoon Lee & John W. Fowler. (2009) Integer programming-based real-time scheduler in semiconductor manufacturing. Integer programming-based real-time scheduler in semiconductor manufacturing.
Yeong-Dae Kim, June-Young Bang, Kwee-Yeon An & Seung-Kil Lim. (2008) A Due-Date-Based Algorithm for Lot-Order Assignment in a Semiconductor Wafer Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing 21:2, pages 209-216.
Crossref
Muh-Cherng Wu, Jr-Hsiung Jiang & Wen-Jen Chang. (2008) Scheduling a hybrid MTO/MTS semiconductor fab with machine-dedication features. International Journal of Production Economics 112:1, pages 416-426.
Crossref
D. Y. Sha, Sheng-Yuan Hsu & X. D. Lai. (2006) Design of due-date oriented look-ahead batching rule in wafer fabrication. The International Journal of Advanced Manufacturing Technology 35:5-6, pages 596-609.
Crossref
M. Mathirajan, V. Chandru & A. I. Sivakumar. (2008) Heuristic algorithms for scheduling heat-treatment furnaces of steel casting industries. Sadhana 32:5, pages 479-500.
Crossref
D.Y. Sha, S.Y. Hsu, Z.H. Che & C.H. Chen. (2006) A dispatching rule for photolithography scheduling with an on-line rework strategy. Computers & Industrial Engineering 50:3, pages 233-247.
Crossref
Giovanni Miragliotta & Marco Perona. (2005) Decentralised, multi-objective driven scheduling for reentrant shops: A conceptual development and a test case. European Journal of Operational Research 167:3, pages 644-662.
Crossref
Shie-Gheun Koh, Pyung-Hoi Koo, Dong-Chun Kim & Won-Suk Hur. (2005) Scheduling a single batch processing machine with arbitrary job sizes and incompatible job families. International Journal of Production Economics 98:1, pages 81-96.
Crossref
Yeong-Dae Kim, Sang-Oh Shim, Bum Choi & Hark Hwang. (2003) Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing 16:2, pages 290-298.
Crossref
D.-J. van der Zee. (2003) Look-ahead strategies for controlling batch operations in industry - an overview. Look-ahead strategies for controlling batch operations in industry - an overview.
C.S. Sung, Y.I. Choung, J.M. Hong & Y.H. Kim. (2002) Minimizing makespan on a single burn-in oven with job families and dynamic job arrivals. Computers & Operations Research 29:8, pages 995-1007.
Crossref
D.-J. van der Zee. (2001) Real-time adaptive control of multi-product multi-server bulk service processes. Real-time adaptive control of multi-product multi-server bulk service processes.
Yeong-Dae Kim, Jae-Gon Kim, Bum Choi & Hyung-Un Kim. (2001) Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates. IEEE Transactions on Robotics and Automation 17:5, pages 589-598.
Crossref
C.S. Sung & Y.I. Choung. (2000) Minimizing makespan on a single burn-in oven in semiconductor manufacturing. European Journal of Operational Research 120:3, pages 559-574.
Crossref
D.-J. van der Zee. (2000) Look-ahead strategies for controlling batch operations in industry-overview, comparison and exploration. Look-ahead strategies for controlling batch operations in industry-overview, comparison and exploration.
Kim Yeong-Dae, Lee Dong-Ho, Kim Jung-Ug & Roh Hwan-Kyun. (1998) A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities. Journal of Manufacturing Systems 17:2, pages 107-117.
Crossref
E. Schorn-DiSalvi, R. Liquigan, B.A. Peters & J.S. Smith. (1995) Development of an intelligent scheduler for semiconductor manufacturing facilities. Development of an intelligent scheduler for semiconductor manufacturing facilities.
E. Neacy, N. Abt, S. Brown, M. McDavid, J. Robinson, S. Srodes & T. Stanley. (1993) Cost Analysis for a Multiple Product / Multiple Process Factory: Application of SEMATECH's Future Factory Design Methodology. Cost Analysis for a Multiple Product / Multiple Process Factory: Application of SEMATECH's Future Factory Design Methodology.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.