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IIE Transactions Volume 44, 2012 - Issue 1: Quality & Reliability Engineering
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ORIGINAL ARTICLES

Sequential measurement strategy for wafer geometric profile estimation

Ran Jin H. Milton Stewart School of Industrial and Systems Engineering, Georgia Institute of Technology, 765 Ferst Drive NW, Atlanta, GA, 30332, USA
,
Chia-Jung Chang H. Milton Stewart School of Industrial and Systems Engineering, Georgia Institute of Technology, 765 Ferst Drive NW, Atlanta, GA, 30332, USA
&
Jianjun Shi H. Milton Stewart School of Industrial and Systems Engineering, Georgia Institute of Technology, 765 Ferst Drive NW, Atlanta, GA, 30332, USA
Pages 1-12 | Received 01 Apr 2010, Accepted 01 Dec 2010, Published online: 07 Nov 2011

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Ning Ding, Zhen He, Shuguang He & Lisha Song. (2024) Real-time profile monitoring schemes considering covariates using Gaussian process via sensor data. Quality Technology & Quantitative Management 21:1, pages 35-53.
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Zhehui Chen, Simon Mak & C. F. Jeff Wu. (2023) A Hierarchical Expected Improvement Method for Bayesian Optimization. Journal of the American Statistical Association 0:0, pages 1-14.
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Mohammad Nabhan, Yajun Mei & Jianjun Shi. (2021) Correlation-based dynamic sampling for online high dimensional process monitoring. Journal of Quality Technology 53:3, pages 289-308.
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Hao Yan, Kamran Paynabar & Jianjun Shi. (2020) AKM2D: An adaptive framework for online sensing and anomaly quantification. IISE Transactions 52:9, pages 1032-1046.
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Li Zeng, Xinwei Deng & Jian Yang. (2018) Constrained Gaussian process with application in tissue-engineering scaffold biodegradation. IISE Transactions 50:5, pages 431-447.
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Chen Zhang, Yong Lei, Linmiao Zhang & Nan Chen. (2017) Modeling tunnel profile in the presence of coordinate errors: A Gaussian process-based approach. IISE Transactions 49:11, pages 1065-1077.
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Linmiao Zhang, Kaibo Wang & Nan Chen. (2016) Monitoring wafers’ geometric quality using an additive Gaussian process model. IIE Transactions 48:1, pages 1-15.
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V. Roshan Joseph, Tirthankar Dasgupta, Rui Tuo & C. F. Jeff Wu. (2015) Sequential Exploration of Complex Surfaces Using Minimum Energy Designs. Technometrics 57:1, pages 64-74.
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Andi Wang, Kaibo Wang & Fugee Tsung. (2014) Statistical Surface Monitoring by Spatial-Structure Modeling. Journal of Quality Technology 46:4, pages 359-376.
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Lulu Bao, Kaibo Wang & Ran Jin. (2014) A hierarchical model for characterising spatial wafer variations. International Journal of Production Research 52:6, pages 1827-1842.
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Articles from other publishers (17)

Geet Lahoti, Chitta Ranjan, Jialei Chen, Hao Yan & Chuck Zhang. (2023) Convolutional Neural Network-Assisted Adaptive Sampling for Sparse Feature Detection in Image and Video Data. IEEE Intelligent Systems 38:1, pages 45-57.
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Bing Yao, Yun Chen & Hui Yang. (2022) Constrained Markov Decision Process Modeling for Optimal Sensing of Cardiac Events in Mobile Health. IEEE Transactions on Automation Science and Engineering 19:2, pages 1017-1029.
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Yuhang Yang, Varun A. Kelkar, Hemangg S. Rajput, Adriana C. Salazar Coariti, Kimani C. ToussaintJrJr & Chenhui Shao. (2022) Machine-learning-enabled geometric compliance improvement in two-photon lithography without hardware modifications. Journal of Manufacturing Processes 76, pages 841-849.
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Zhaohui Geng & Bopaya Bidanda. (2021) Geometric precision analysis for Additive Manufacturing processes: A comparative study. Precision Engineering 69, pages 68-76.
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Yuhang Yang, Zhiqiao Dong, Yuquan Meng & Chenhui Shao. (2021) Data-Driven Intelligent 3D Surface Measurement in Smart Manufacturing: Review and Outlook. Machines 9:1, pages 13.
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Xiaowei Yue, Yuchen Wen, Jeffrey H. Hunt & Jianjun Shi. (2021) Active Learning for Gaussian Process Considering Uncertainties With Application to Shape Control of Composite Fuselage. IEEE Transactions on Automation Science and Engineering 18:1, pages 36-46.
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Zhenguo Gao, Pang Du, Ran Jin & John L. Robertson. (2020) Surface temperature monitoring in liver procurement via functional variance change-point analysis. The Annals of Applied Statistics 14:1.
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Yuhang Yang, Yifang Zhang, Y. Dora Cai, Qiyue Lu, Seid Koric & Chenhui Shao. (2019) Hierarchical measurement strategy for cost-effective interpolation of spatiotemporal data in manufacturing. Journal of Manufacturing Systems 53, pages 159-168.
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Namjung Kim, Chen Yang, Howon Lee & Narayana Aluru. (2019) Spatial Uncertainty Modeling for Surface Roughness of Additively Manufactured Microstructures via Image Segmentation. Applied Sciences 9:6, pages 1093.
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Jie Ren & Hui Wang. (2019) Surface Variation Modeling by Fusing Multiresolution Spatially Nonstationary Data Under a Transfer Learning Framework. Journal of Manufacturing Science and Engineering 141:1.
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Sean McLoone, Adrian Johnston & Gian Antonio Susto. (2018) A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles. IEEE Transactions on Automation Science and Engineering 15:4, pages 1692-1703.
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Jia Peter Liu, Ran Jin & Zhenyu James Kong. (2018) Wafer quality monitoring using spatial Dirichlet process based mixed-effect profile modeling scheme. Journal of Manufacturing Systems 48, pages 21-32.
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Jie Ren, Chiwoo Park & Hui Wang. (2018) Stochastic Modeling and Diagnosis of Leak Areas for Surface Assembly. Journal of Manufacturing Science and Engineering 140:4.
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Gian Antonio Susto, Marco Maggipinto, Federico Zocco & Sean McLoone. (2018) A Dynamic Sampling Approach for Cost Reduction in Semiconductor Manufacturing. Procedia Manufacturing 17, pages 1031-1038.
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Chenhui Shao, Jionghua (Judy) Jin & S. Jack Hu. (2017) Dynamic Sampling Design for Characterizing Spatiotemporal Processes in Manufacturing. Journal of Manufacturing Science and Engineering 139:10.
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Hongyue Sun, Shuai Luo, Ran Jin & Zhen He. (2015) Multitask Lasso Model for Investigating Multimodule Design Factors, Operational Factors, and Covariates in Tubular Microbial Fuel Cells. ACS Sustainable Chemistry & Engineering 3:12, pages 3231-3238.
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Linmiao Zhang, Yong Lei & Nan Chen. (2015) Modeling tunnel profile using Gaussian process. Modeling tunnel profile using Gaussian process.

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