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IIE Transactions Volume 45, 2013 - Issue 6: Integration of Manufacturing System Design and Quality Management
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Original Articles

Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool

Fan-Tien Cheng Institute of Manufacturing Information & Systems, National Cheng Kung University, Tainan, Taiwan, Republic of China
&
Yu-Chen Chiu Institute of Manufacturing Information & Systems, National Cheng Kung University, Tainan, Taiwan, Republic of China
Pages 670-681 | Received 01 Feb 2012, Accepted 01 Jul 2012, Published online: 07 Mar 2013

Citations (10)

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Read on this site (4)

Dong-Hee Lee. (2020) An inspection procedure for radio frequency repeaters using a multiple linear regression method. Communications in Statistics - Theory and Methods 49:13, pages 3137-3152.
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Haw-Ching Yang, Hao Tieng & Fan-Tien Cheng. (2016) Automatic virtual metrology for wheel machining automation. International Journal of Production Research 54:21, pages 6367-6377.
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Haw-Ching Yang, Hao Tieng & Fan-Tien Cheng. (2016) Total precision inspection of machine tools with virtual metrology. Journal of the Chinese Institute of Engineers 39:2, pages 221-235.
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Fan-Tien Cheng, Chun-Fang Chen, Yao-Sheng Hsieh, Hsuan-Heng Huang & Chu-Chieh Wu. (2015) Intelligent sampling decision scheme based on the AVM system. International Journal of Production Research 53:7, pages 2073-2088.
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Articles from other publishers (6)

Fan‐Tien Cheng. 2021. Industry 4.1. Industry 4.1 275 329 .
Fan‐Tien Cheng, Yu‐Chen Chiu, Yu‐Ming Hsieh, Hao Tieng, Chin‐Yi Lin & Hsien‐Cheng Huang. 2021. Industry 4.1. Industry 4.1 409 519 .
Wenwen Tian, Fei Zhao, Zheng Sun, Suiyan Shang, Xuesong Mei & Guangde Chen. (2020) A Novel Performance Prediction Model for the Machining Process Based on the Interval Type-2 Fuzzy Neural Network. Mathematical Problems in Engineering 2020, pages 1-10.
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Hyun-Joon Roh, Sangwon Ryu, Yunchang Jang, Nam-Kyun Kim, Younggil Jin, Seolhye Park & Gon-Ho Kim. (2018) Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables. IEEE Transactions on Semiconductor Manufacturing 31:2, pages 232-241.
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Fan-Tien Cheng, Hao Tieng, Haw-Ching Yang, Min-Hsiung Hung, Yu-Chuan Lin, Chun-Fan Wei & Zih-Yan Shieh. (2016) Industry 4.1 for Wheel Machining Automation. IEEE Robotics and Automation Letters 1:1, pages 332-339.
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Fan-Tien Cheng, Chi-An Kao, Chun-Fang Chen & Wen-Huang Tsai. (2015) Tutorial on Applying the VM Technology for TFT-LCD Manufacturing. IEEE Transactions on Semiconductor Manufacturing 28:1, pages 55-69.
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