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IIE Transactions Volume 45, 2013 - Issue 6: Integration of Manufacturing System Design and Quality Management
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Original Articles

A batch-based run-to-run process control scheme for semiconductor manufacturing

Kaibo Wang Department of Industrial Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
&
Kai Han Department of Industrial Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
Pages 658-669 | Received 01 Nov 2011, Accepted 01 Sep 2012, Published online: 07 Mar 2013

Citations (12)

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Read on this site (4)

Yanrong Li, Juan Du & Wei Jiang. (2023) Reinforcement learning for process control with application in semiconductor manufacturing. IISE Transactions 0:0, pages 1-15.
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Xiaonan Liu, Andrew M. Gough & Jing Li. (2018) Semiconductor corner lot generation robust to process variation: Modeling and analysis. IISE Transactions 50:2, pages 126-139.
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Lulu Bao, Kaibo Wang & Tianying Wu. (2014) A run-to-run controller for product surface quality improvement. International Journal of Production Research 52:15, pages 4469-4487.
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Lulu Bao, Kaibo Wang & Ran Jin. (2014) A hierarchical model for characterising spatial wafer variations. International Journal of Production Research 52:6, pages 1827-1842.
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Articles from other publishers (8)

Atefe Banihashemi, Mohammad Saber Fallah Nezhad & Amirhossein Amiri. (2021) A new approach in the economic design of acceptance sampling plans based on process yield index and Taguchi loss function. Computers & Industrial Engineering 159, pages 107155.
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Delin Huang & Jun Lv. (2020) Run-to-run control of batch production process in manufacturing systems based on online measurement. Computers & Industrial Engineering 141, pages 106298.
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Kai Liu, YangQuan Chen, Tao Zhang, Siyuan Tian & Xi Zhang. (2018) A survey of run-to-run control for batch processes. ISA Transactions 83, pages 107-125.
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Liping Zhao, Guangzhou Diao & Yiyong Yao. (2016) A Dynamic Process Adjustment Method Based on Residual Prediction for Quality Improvement. IEEE Transactions on Industrial Informatics 12:1, pages 41-50.
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Tingting Huang, Shanggang Wang & Ketai He. (2015) Quality control for fused deposition modeling based additive manufacturing: Current research and future trends. Quality control for fused deposition modeling based additive manufacturing: Current research and future trends.
Jun Zhang, Wei Li, Kaibo Wang & Ran Jin. (2014) Process adjustment with an asymmetric quality loss function. Journal of Manufacturing Systems 33:1, pages 159-165.
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Marcello Colledani, Tullio Tolio, Anath Fischer, Benoit Iung, Gisela Lanza, Robert Schmitt & József Váncza. (2014) Design and management of manufacturing systems for production quality. CIRP Annals 63:2, pages 773-796.
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Kai Han & Kaibo Wang. (2013) Coordination and control of batch-based multistage processes. Journal of Manufacturing Systems 32:2, pages 372-381.
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