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IIE Transactions Volume 48, 2016 - Issue 1: Quality & Reliability Engineering
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Original Articles

Monitoring wafers’ geometric quality using an additive Gaussian process model

Linmiao ZhangDepartment of Industrial and Systems Engineering, National University of Singapore, SingaporeView further author information
,
Kaibo WangDepartment of Industrial Engineering, Tsinghua University, Beijing, People’s Republic of ChinaView further author information
&
Nan ChenDepartment of Industrial and Systems Engineering, National University of Singapore, SingaporeCorrespondence[email protected]
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Pages 1-15 | Received 31 Mar 2013, Accepted 27 Feb 2015, Published online: 17 Jul 2015

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Ning Ding, Zhen He, Shuguang He & Lisha Song. (2024) Real-time profile monitoring schemes considering covariates using Gaussian process via sensor data. Quality Technology & Quantitative Management 21:1, pages 35-53.
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A. Valeria Quevedo & G. Geoffrey Vining. (2023) A non-linear mixed model approach for detecting outlying profiles. Journal of Quality Technology 55:5, pages 550-565.
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Jie Guo, Hao Yan & Chen Zhang. (2023) A Bayesian Partially Observable Online Change Detection Approach with Thompson Sampling. Technometrics 65:2, pages 179-191.
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Jaeseung Baek, Myong K. Jeong & Elsayed A. Elsayed. (2023) Monitoring variations in multimode surface topography. International Journal of Production Research 61:4, pages 1129-1145.
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Romina Dastoorian, Lee Wells & Mohammed Shafae. (2022) Assessing the performance of control charts for detecting previously unexplored shift types in high density spatial data. Quality Engineering 34:1, pages 125-141.
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A. Valeria Quevedo & G. Geoffrey Vining. (2022) Online monitoring of nonlinear profiles using a Gaussian process model with heteroscedasticity. Quality Engineering 34:1, pages 58-74.
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Mithun Ghosh, Yongxiang Li, Li Zeng, Zijun Zhang & Qiang Zhou. (2021) Modeling multivariate profiles using Gaussian process-controlled B-splines. IISE Transactions 53:7, pages 787-798.
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Mejdal A. Alqahtani, Myong K. Jeong & Elsayed A. Elsayed. (2020) Multilevel spatial randomness approach for monitoring changes in 3D topographic surfaces. International Journal of Production Research 58:18, pages 5545-5558.
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Lulu Kang, Xiaoning Kang, Xinwei Deng & Ran Jin. (2018) A Bayesian hierarchical model for quantitative and qualitative responses. Journal of Quality Technology 50:3, pages 290-308.
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Yongxiang Li, Qiang Zhou, Xiaohu Huang & Li Zeng. (2018) Pairwise Estimation of Multivariate Gaussian Process Models With Replicated Observations: Application to Multivariate Profile Monitoring. Technometrics 60:1, pages 70-78.
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Chen Zhang, Yong Lei, Linmiao Zhang & Nan Chen. (2017) Modeling tunnel profile in the presence of coordinate errors: A Gaussian process-based approach. IISE Transactions 49:11, pages 1065-1077.
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Raed Kontar, Shiyu Zhou & John Horst. (2017) Estimation and monitoring of key performance indicators of manufacturing systems using the multi-output Gaussian process. International Journal of Production Research 55:8, pages 2304-2319.
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Chengyu Tao & Juan Du. (2023) PointSGRADE: Sparse Learning with Graph Representation for Anomaly Detection by Using Unstructured 3D Point Cloud Data. IISE Transactions, pages 1-22.
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Jaeseung Baek, Myong K. Jeong & Elsayed A. Elsayed. (2023) Spatial randomness-based anomaly detection approach for monitoring local variations in multimode surface topography. Annals of Operations Research.
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Chen Zhao, Shichang Du, Jun Lv, Yafei Deng & Guilong Li. (2021) A novel parallel classification network for classifying three-dimensional surface with point cloud data. Journal of Intelligent Manufacturing 34:2, pages 515-527.
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Hui Yang, Siqi Zhang, Yan Lu, Paul Witherell & Soundar Kumara. (2022) Spatiotemporal Monitoring of Melt-Pool Variations in Metal-Based Additive Manufacturing. IEEE Robotics and Automation Letters 7:3, pages 8249-8256.
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Peng Zhou, Peiyao Liu, Shilong Wang, Chen Zhang, Junxing Zhang & Shaobo Li. (2022) Functional state-space model for multi-channel autoregressive profiles with application in advanced manufacturing. Journal of Manufacturing Systems 64, pages 356-371.
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Yuhang Yang, Varun A. Kelkar, Hemangg S. Rajput, Adriana C. Salazar Coariti, Kimani C. ToussaintJrJr & Chenhui Shao. (2022) Machine-learning-enabled geometric compliance improvement in two-photon lithography without hardware modifications. Journal of Manufacturing Processes 76, pages 841-849.
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Wilma Polini & Rocco Ascione. (2021) Kriging quick adaptive sampling for multivariate optimization. The International Journal of Advanced Manufacturing Technology 119:3-4, pages 2007-2022.
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Shiyu Zhou & Yong Chen. 2022. Industrial Data Analytics for Diagnosis and Prognosis. Industrial Data Analytics for Diagnosis and Prognosis 315 326 .
Jaeseung Baek, Myong K. Jeong & Elsayed A. Elsayed. (2022) Residual-Based Surface Segmentation for Monitoring Topographic Variations. IEEE Transactions on Automation Science and Engineering 19:1, pages 280-294.
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Runsang Liu, Bryan D. Vogt & Hui Yang. (2021) Gaussian Process Monitoring of Layerwise-Dependent Imaging Data. IEEE Robotics and Automation Letters 6:4, pages 8029-8036.
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Yuhang Yang & Chenhui Shao. (2021) Hybrid multi-task learning-based response surface modeling in manufacturing. Journal of Manufacturing Systems 59, pages 607-616.
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Romina Dastoorian & Lee Wells. (2020) Gauge capability studies for high-density data: SPC Phase 0. Procedia Manufacturing 48, pages 105-113.
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Yanfen Shang, Tao Li, Lisha Song & Zhiqiong Wang. (2019) Control charts for monitoring two-dimensional spatial count data with spatial correlations. Computers & Industrial Engineering 137, pages 106043.
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Bing Yao, Farhad Imani & Hui Yang. (2018) Markov Decision Process for Image-Guided Additive Manufacturing. IEEE Robotics and Automation Letters 3:4, pages 2792-2798.
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Jia Peter Liu, Ran Jin & Zhenyu James Kong. (2018) Wafer quality monitoring using spatial Dirichlet process based mixed-effect profile modeling scheme. Journal of Manufacturing Systems 48, pages 21-32.
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Hang Dong, Nan Chen & Kaibo Wang. (2017) Wafer yield prediction using derived spatial variables. Quality and Reliability Engineering International 33:8, pages 2327-2342.
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Chen Kan & Hui Yang. (2017) Dynamic network monitoring and control of in situ image profiles from ultraprecision machining and biomanufacturing processes. Quality and Reliability Engineering International 33:8, pages 2003-2022.
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Iman Hassaninia, Ramin Bostanabad, Wei Chen & Hooman Mohseni. (2017) Characterization of the Optical Properties of Turbid Media by Supervised Learning of Scattering Patterns. Scientific Reports 7:1.
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Youyi Cai, Wenming Zheng, Tong Zhang, Qiang Li, Zhen Cui & Jiayin Ye. 2016. Pattern Recognition. Pattern Recognition 679 691 .
Chen Kan & Hui Yang. (2015) Network models for monitoring high-dimensional image profiles. Network models for monitoring high-dimensional image profiles.

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