Advanced search
Publication Cover
Molecular Simulation Volume 30, 2004 - Issue 13-15: International Conference on Molecular Simulation, Tsukuba, 2004
Submit an article Journal homepage
69
Views
4
CrossRef citations to date
0
Altmetric
Original Articles

Monte Carlo Simulation of Thin Film Growth with Defect Formation: Application to Via Filling

Yutaka Kaneko Department of Applied Analysis and Complex Dynamical Systems, Graduate School of Informatics, Kyoto University, Kyoto, 606-8501, JapanCorrespondence[email protected]
,
Yasuaki Hiwatari Department of Computational Science, Faculty of Science, Kanazawa University, Kanazawa, 920-1192, Japan
&
Katsuhiko Ohara C. Uyemura & Co., Ltd., 1-5-1, Deguchi, Hirakata, Osaka, 573-0065, Japan
Pages 895-899 | Received 01 Jan 2004, Accepted 01 Feb 2004, Published online: 17 Jul 2006

Citations (4)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (1)

Y. Kaneko, Y. Hiwatari, K. Ohara & F. Asa. (2006) Monte Carlo simulation of damascene electroplating: effects of additives. Molecular Simulation 32:15, pages 1227-1232.
Read now

Articles from other publishers (3)

Antti Pohjoranta & Robert Tenno. (2014) Microvia fill process model and control. Journal of Mathematical Chemistry 52:5, pages 1414-1440.
Crossref
Yutaka Kaneko. 2014. Copper Electrodeposition for Nanofabrication of Electronics Devices. Copper Electrodeposition for Nanofabrication of Electronics Devices 63 95 .
Yutaka Kaneko, Yasuaki Hiwatari, Katsuhiko Ohara & Fujio Asa. (2013) Kinetic Monte Carlo simulation of three-dimensional shape evolution with void formation using Solid-by-Solid model: Application to via and trench filling. Electrochimica Acta 100, pages 321-328.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.