Jesús Vilaboa Pérez, Marc Georges, Juriy Hastanin & Jérôme Loicq. (2023) Experimental results of an innovative dynamic low-coherent interferometer for characterizing a gravitational wave detector. Experimental results of an innovative dynamic low-coherent interferometer for characterizing a gravitational wave detector.
Weiwei Chen, Yupeng Xiong, Junren Chen & Shanyong Chen. (2023) Accurate white light phase-shifting interferometry under PZT scanning error. Optics and Lasers in Engineering 169, pages 107728.
Crossref
Yinrui Li, Yingzhe Yang, Jiale Zhang, Qun Yuan & Yiyong Liang. (2023) Envelope peak detection algorithm based on the CEEMDAN in white light interferometry. Optics Continuum 2:8, pages 1875.
Crossref
Yiting Duan & Xiaodong Zhang. (2023) Parallel unambiguous generalized phase-shifting and T-spline fitting algorithms for optical micro-structured surface 3D topography metrology. Applied Optics 62:10, pages 2410.
Crossref
Xiaojin Huang, Jianguo He, Qian Liu, Jiawei Lu & Hui Zhang. (2023) Coarse-to-fine auto-focus method using a white-and-red light source for white-light scanning interferometers. Optik 276, pages 170634.
Crossref
吴冠豪 Wu Guanhao, 施立恒 Shi Liheng & 李尔格 Li Erge. (2023) 基于光学频率梳的表面形貌测量方法. Laser & Optoelectronics Progress 60:3, pages 0312013.
Crossref
Hyo Mi Park, Seon Ile Seo, Min Seo Cho & Ki-Nam Joo. (2022) High-precision polarized dual low-coherence scanning interferometry for rapid step height measurements. Applied Optics 62:1, pages 39.
Crossref
Uihyeok Kwon & Ki-Nam Joo. (2022) Dual Optical Measurement Probe System for Double-Sided Film Structure. International Journal of Precision Engineering and Manufacturing 23:10, pages 1123-1131.
Crossref
Tao ChunKan, Tao Rui, Kang Tianyou, Hu MengYao, Wu YuJing, Yang MingJie, Yang XiaoChun, Wang YePing, Qian YunSheng & Zhang YiJun. (2021) Graphene Superconductivity at Room‐Temperature of a Wide Range and Standard Atmosphere, Based on Vacuum Channels and White‐Light Interferometry. Advanced Electronic Materials 8:1, pages 2100595.
Crossref
yuqin Wang & Rongzhu zhang. (2021) Correction of wavelength error of white-light interference phase-shifting algorithm. Correction of wavelength error of white-light interference phase-shifting algorithm.
Mingliang Duan, Jianxin Li, Shuxian Bi, Yi Zong, Caiyun Yu & Renhui Guo. (2021) Dynamic white-light interferometry via multiwavelength tilt iteration and sliding local least squares. Optics Letters 46:23, pages 5810.
Crossref
Namyoon Kim & Soonyang Kwon. (2021) Correction of PZT scanner errors using a phase compensation method in white-light phase-shifting interferometry. Applied Optics 60:30, pages 9311.
Crossref
Dongxu Wu & Fengzhou Fang. (2020) Development of surface reconstruction algorithms for optical interferometric measurement. Frontiers of Mechanical Engineering 16:1, pages 1-31.
Crossref
Yang Li & Sheng-Qian Wang. (2021) Optical phasing method based on scanning white-light interferometry for multi-aperture optical telescopes. Optics Letters 46:4, pages 793.
Crossref
Mei Sang, Xiangyu Du, Shuang Wang, Tianhua Xu, Jie Dong & Tiegen Liu. (2020) Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy. Optics Express 28:10, pages 15101.
Crossref
Xinyu Yan, Jie Cheng, Dian Bian, Yang Lu & Liandong Yu. (2019) Surface profile measurement of doped silicon using near-infrared low-coherence light. Applied Optics 58:27, pages 7436.
Crossref
Jun Woo Jeon, Hee Won Jeong, Hyo Bin Jeong & Ki-Nam Joo. (2019) High-speed polarized low coherence scanning interferometry based on spatial phase shifting. Applied Optics 58:20, pages 5360.
Crossref
ChunKan Tao, YuJing Wu, WeiYi Wang, YunSheng Qian, Rui Tao & Tianyou Kang. (2019) Experimental investigation of white-light interferometry based on sub-dark-field illumination. Optics Communications 435, pages 108-117.
Crossref
Michael QuintenMichael Quinten. 2019. A Practical Guide to Surface Metrology. A Practical Guide to Surface Metrology
95
198
.
Shuming Yang & Guofeng Zhang. (2018) A review of interferometry for geometric measurement. Measurement Science and Technology 29:10, pages 102001.
Crossref
Johann Krauter & Wolfgang Osten. (2018) Inspection of hidden MEMS by an infrared low-coherence interferometric microscope. Inspection of hidden MEMS by an infrared low-coherence interferometric microscope.
Johann Krauter & Wolfgang Osten. (2018) Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope. Surface Topography: Metrology and Properties 6:1, pages 015005.
Crossref
Guoping Lin, Rémi Henriet, Aurélien Coillet, Maxime Jacquot, Luca Furfaro, Gilles Cibiel, Laurent Larger & Yanne K. Chembo. (2018) Dependence of quality factor on surface roughness in crystalline whispering-gallery mode resonators. Optics Letters 43:3, pages 495.
Crossref
Quangsang Vo, Fengzhou Fang, Xiaodong Zhang & Huimin Gao. (2017) Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms. Applied Optics 56:29, pages 8174.
Crossref
Chunkan Tao, Weiyi Wang, Yijun Zhang, Yujing Wu & Yunsheng Qian. (2017) Application of white-light phase-shifting in white-light scanning interferometry. Application of white-light phase-shifting in white-light scanning interferometry.
Yi Zhou, Yan Tang, Qinyuan Deng, Junbo Liu, Jian Wang & Lixin Zhao. (2017) Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes. Optics & Laser Technology 93, pages 187-193.
Crossref
Arnaud Dubois. (2017) A simplified algorithm for digital fringe analysis in two-wave interferometry with sinusoidal phase modulation. Optics Communications 391, pages 128-134.
Crossref
Tong Guo, Feng Li, Jinping Chen, Xing Fu & Xiaotang Hu. (2016) Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference. Optics and Lasers in Engineering 82, pages 41-47.
Crossref
Tiegen Liu, Junfeng Shi, Junfeng Jiang, Kun Liu, Shuang Wang, Jinde Yin & Shengliang Zou. (2015) Nonperpendicular Incidence Induced Spatial Frequency Drift in Polarized Low-Coherence Interferometry and Its Compensation. IEEE Photonics Journal 7:6, pages 1-7.
Crossref
Min Zhong, Xianyu Su, Wenjing Chen, Zhisheng You, Mingteng Lu & Hailong Jing. (2014) Modulation measuring profilometry with auto-synchronous phase shifting and vertical scanning. Optics Express 22:26, pages 31620.
Crossref
Young-Sik Ghim, Angela Davies & Hyug-Gyo Rhee. (2014) Accuracy Improvement and Systematic Bias Analysis of Scanning White Light Interferometry for Free-form Surfaces Measurements. Journal of the Korean Society for Precision Engineering 31:7, pages 605-613.
Crossref
Sanjit K. Debnath, Yogesh Verma & Pradeep K. Gupta. (2014) White light diffraction phase microscopy as profilometry tool. Optical Engineering 53:9, pages 092008.
Crossref
Shuang Wang, Tiegen Liu, Junfeng Jiang, Kun Liu, Jinde Yin, Zunqi Qin & Shengliang Zou. (2014) Zero-fringe demodulation method based on location-dependent birefringence dispersion in polarized low-coherence interferometry. Optics Letters 39:7, pages 1827.
Crossref
Ki-Nam Joo. (2013) Sub-sampling low coherence scanning interferometry and its application: refractive index measurements of a silicon wafer. Applied Optics 52:36, pages 8644.
Crossref
Shuang Wang, Tiegen Liu, Junfeng Jiang, Kun Liu, Jinde Yin, Fan Wu, Bofu Zhao, Lei Xue, Yunqiao Mei & Zhenhai Wu. Improving demodulation accuracy of low-coherence interferometer against spatial-frequency nonlinearity. Improving demodulation accuracy of low-coherence interferometer against spatial-frequency nonlinearity.
SeongRyong Kim, JungHwan Kim & HeuiJae Pahk. (2013) Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping. Journal of the Optical Society of Korea 17:5, pages 415-422.
Crossref
Joshua T. Wiersma & James C. Wyant. (2013) Vibration insensitive extended range interference microscopy. Applied Optics 52:24, pages 5957.
Crossref
Shuang Wang, Tiegen Liu, Junfeng Jiang, Kun Liu, Jinde Yin & Fan Wu. (2013) Birefringence dispersion compensation demodulation algorithm for polarized low-coherence interferometry. Optics Letters 38:16, pages 3169.
Crossref
Shaohua Wang, Junfeng Jiang, Tiegen Liu, Kun Liu, Jinde Yin, Xiange Meng & Lei Li. (2012) A Simple and Effective Demodulation Method for Polarized Low-Coherence Interferometry. IEEE Photonics Technology Letters 24:16, pages 1390-1392.
Crossref
Junfeng Jiang, Shaohua Wang, Tiegen Liu, Kun Liu, Jinde Yin, Xiange Meng, Yimo Zhang, Shuang Wang, Zunqi Qin, Fan Wu & Dingjie Li. (2012) A polarized low-coherence interferometry demodulation algorithm by recovering the absolute phase of a selected monochromatic frequency. Optics Express 20:16, pages 18117.
Crossref
K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila & E. Hæggström. (2012) Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters 37:10, pages 1703.
Crossref
Young-Sik Ghim & Angela Davies. (2012) Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique. Applied Optics 51:12, pages 1922.
Crossref
Jing-tao Dong & Rong-sheng Lu. (2012) A five-point stencil based algorithm used for phase shifting low-coherence interference microscopy. Optics and Lasers in Engineering 50:3, pages 502-511.
Crossref
Tong Guo, Long Ma, Jian Zhao, Dante J. Dorantes-Gonzalez, Xing Fu & Xiaotang Hu. (2011) A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement. Optics and Lasers in Engineering 49:9-10, pages 1124-1130.
Crossref
Jing-tao Dong & Rong-sheng Lu. (2011) Achromatic phase shifter with eight times magnification of rotation angle in low coherence interference microscopy. Applied Optics 50:8, pages 1113.
Crossref
Peter de Groot. 2011. Optical Measurement of Surface Topography. Optical Measurement of Surface Topography
187
208
.
Hsin-Hung Liao & Yao-Joe Yang. (2010) A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling. Journal of Micromechanics and Microengineering 20:10, pages 105009.
Crossref
Florin Munteanu. (2010) Self-calibrating lateral scanning white-light interferometer. Applied Optics 49:12, pages 2371.
Crossref
M. Dobosz & O. Iwasinska-Kowalska. (2010) A new method of non-contact gauge block calibration using a fringe-counting technique: I. Theoretical basis. Optics & Laser Technology 42:1, pages 141-148.
Crossref
Hsin-Hung Liao & Yao-Joe Yang. (2010) A linnik scanning white-light interferometry system using a mems digital-to-analog converter. Procedia Engineering 5, pages 758-761.
Crossref
Sanjit Kumar Debnath, Joonho You & Seung-Woo Kim. (2010) Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry. International Journal of Precision Engineering and Manufacturing 10:5, pages 5-10.
Crossref
Sanjit K. Debnath, Mahendra P. Kothiyal & Seung-Woo Kim. (2009) Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques. Optics and Lasers in Engineering 47:11, pages 1125-1130.
Crossref
Ivan Kassamakov, Kalle Hanhijärvi, Imad Abbadi, Juha Aaltonen, Hanne Ludvigsen & Edward Hæggström. (2009) Scanning white-light interferometry with a supercontinuum source. Optics Letters 34:10, pages 1582.
Crossref
Maitreyee Roy, Joanna Schmit & Parameswaran Hariharan. (2009) White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting. Optics Express 17:6, pages 4495.
Crossref
Matthias Fleischer, Tobias Gnausch, Daniel Supp & Jonathan Becker. 2009. Fringe 2009. Fringe 2009
1
4
.
M. Li, C. Quan & C.J. Tay. (2008) Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry. Optics & Laser Technology 40:7, pages 920-929.
Crossref
J Schmit, J Reed, E Novak & J K Gimzewski. (2008) Performance advances in interferometric optical profilers for imaging and testing. Journal of Optics A: Pure and Applied Optics 10:6, pages 064001.
Crossref
Jung-Hwan Kim, Sung-Won Yoon, Jeong-Ho Lee, Woo-Jung Ahn & Heui-Jae Pahk. (2008) New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor. Optics and Lasers in Engineering 46:2, pages 140-148.
Crossref
Sanjit Kumar Debnath & Mahendra Prasad Kothiyal. (2006) Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry. Applied Optics 45:27, pages 6965.
Crossref
S. K. Debnath. (2005) Optical profiler based on spectrally resolved white light interferometry. Optical Engineering 44:1, pages 013606.
Crossref
F Lallemand, D Comte, L Ricq, P Renaux, J Pagetti, C Dieppedale & P Gaud. (2004) Effects of organic additives on electroplated soft magnetic CoFeCr films. Applied Surface Science 225:1-4, pages 59-71.
Crossref
Alain Bosseboeuf & Sylvain Petitgrand. (2003) Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends. Journal of Micromechanics and Microengineering 13:4, pages S23-S33.
Crossref
Santiago Costantino, Oscar E. Martínez & Jorge R. Torga. (2003) Wide band interferometry for thickness measurement. Optics Express 11:8, pages 952.
Crossref
. 2003. Optical Interferometry. Optical Interferometry
311
342
.
Joanna Schmit & Artur Olszak. (2002) High-precision shape measurement by white-light interferometry with real-time scanner error correction. Applied Optics 41:28, pages 5943.
Crossref
F Lallemand, L Ricq, P Berçot & J Pagetti. (2002) Effects of the structure of organic additives in the electrochemical preparation and characterization of CoFe film. Electrochimica Acta 47:26, pages 4149-4156.
Crossref
Peter de Groot, Xavier Colonna de Lega, Jim Kramer & Michael Turzhitsky. (2002) Determination of fringe order in white-light interference microscopy. Applied Optics 41:22, pages 4571.
Crossref
R. Windecker, K. Körner, M. Fleischer & H.J. Tiziani. (2002) Signalverarbeitung bei tiefen-scannenden 3D-Sensoren für neue industrielle Anwendungen (Analysis of Signals from Depth-Scanning 3D-Sensors for Novel Industrial Applications). teme 69:5, pages 251.
Crossref
Klaus Ko¨rner. (2001) One-grating projection for absolute three-dimensional profiling. Optical Engineering 40:8, pages 1653.
Crossref
Robert Windecker, Matthias Fleischer, Klaus Körner & Hans J. Tiziani. (2001) Testing micro devices with fringe projection and white-light interferometry. Optics and Lasers in Engineering 36:2, pages 141-154.
Crossref
Matthias Fleischer, Robert Windecker & Hans J. Tiziani. (2001) Theoretical limits of scanning white-light interferometry signal evaluation algorithms. Applied Optics 40:17, pages 2815.
Crossref
Akiko Harasaki, Joanna Schmit & James C. Wyant. (2001) Offset of coherent envelope position due to phase change on reflection. Applied Optics 40:13, pages 2102.
Crossref
Min-Cheol Park & Seung-Woo Kim. (2001) Compensation of phase change on reflection in white-light interferometry for step height measurement. Optics Letters 26:7, pages 420.
Crossref
Akiko Harasaki, Joanna Schmit & James C. Wyant. (2000) Improved vertical-scanning interferometry. Applied Optics 39:13, pages 2107.
Crossref
Akiko Harasaki & James C. Wyant. (2000) Fringe modulation skewing effect in white-light vertical scanning interferometry. Applied Optics 39:13, pages 2101.
Crossref
Min-Cheol Park. (2000) Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms. Optical Engineering 39:4, pages 952.
Crossref
Matthias Fleischer, Robert Windecker & Hans J. Tiziani. (2000) Fast algorithms for data reduction in modern optical three-dimensional profile measurement systems with MMX technology. Applied Optics 39:8, pages 1290.
Crossref
Patrick Sandoz, Rafael Escalona, Vincent Bonnans & Sounkalo Dembelé. 2000. Interferometry in Speckle Light. Interferometry in Speckle Light
421
428
.
Seung-Woo Kim & Gee-Hong Kim. (1999) Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry. Applied Optics 38:28, pages 5968.
Crossref
C. R. Coggrave. (1999) High-speed surface profilometer based on a spatial light modulator and pipeline image processor. Optical Engineering 38:9, pages 1573.
Crossref
Robert Windecker. (1999) Optical roughness measurements using extended white-light interferometry. Optical Engineering 38:6, pages 1081.
Crossref
J. Paul Lesso, Alan J. Duncan, Wilson Sibbett & Miles J. Padgett. (1998) Surface profilometry based on polarization analysis. Optics Letters 23:23, pages 1800.
Crossref
Patrick Sandoz. (1997) Wavelet transform as a processing tool in white-light interferometry. Optics Letters 22:14, pages 1065.
Crossref