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Journal of Modern Optics Volume 46, 1999 - Issue 1
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Optical topometry of surfaces with locally changing materials, layers, and contaminations. Part 1: Topographic methods, based on two-beam interferometry

K. Leonhardt Universitä Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569, Stuttgart, Germany
&
H. J. Tiziani Universitä Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569, Stuttgart, Germany
Pages 101-114 | Received 05 Jun 1998, Published online: 03 Jul 2009

Citations (7)

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Read on this site (1)

K. Leonhardt . (2005) Optical topometry of surfaces with locally changing materials, layers and contaminations Part 2: Fringe projection topometry. Journal of Modern Optics 52:10, pages 1367-1384.
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Articles from other publishers (6)

Indek Raid, Matthias Eifler, Tatjana Kusnezowa & Jörg Seewig. (2015) Calibration of Ellipso-Height-Topometry with nanoscale gratings of varying materials. Optik 126:23, pages 4591-4596.
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K. Leonhardt. (2014) Interferometry for Ellipso-Height-Topometry part 3: Correction of the aspect errors and reduction of the dispersion of the ellipsometric parameters. Optik 125:18, pages 5286-5294.
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K. Leonhardt. (2010) Interferometry for ellipso-height-topometry. Optik 121:7, pages 623-632.
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Alexander Tavrov, Joanna Schmit, Norbert Kerwien, Wolfgang Osten & Hans Tiziani. (2005) Diffraction-induced coherence levels. Applied Optics 44:11, pages 2202.
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Alexander Tavrov. (2002) Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio. Optical Engineering 41:8, pages 1886.
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K. Leonhardt. (2001) Ellipso-Height Topometry, EHT: extended topometry of surfaces with locally changing materials. Optik 112:9, pages 413-420.
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