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Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 37, 2000 - Issue 2
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Original Articles

NUMERICAL SIMULATION OF CHEMICAL VAPOR DEPOSITION PROCESSES UNDER VARIABLE AND CONSTANT PROPERTY APPROXIMATIONS

Wilson K. S. Chiu, Yogesh Jaluria, Nick G. Glumac
Pages 113-132 | Published online: 29 Oct 2010

Citations (12)

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Read on this site (2)

Wei Huang & WilsonK. S. Chiu. (2006) Heat and Mass Transfer in a CVD Optical Fiber Coating Process by Propane Precursor Gas. Numerical Heat Transfer, Part A: Applications 50:2, pages 147-163.
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C. L. Leakeas & M. A. R. Sharif. (2003) EFFECTS OF THERMAL DIFFUSION AND SUBSTRATE TEMPERATURE ON SILICON DEPOSITION IN AN IMPINGING-JET CVD REACTOR. Numerical Heat Transfer, Part A: Applications 44:2, pages 127-147.
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Articles from other publishers (10)

Roxana Durantes, Justin Moon, J. Rafael Pacheco & Arturo Pacheco-Vega. (2023) On an averaged energy-balance method for the analysis of wavy microchannels. Heat and Mass Transfer.
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Xavier Nicolas & Sophie Mergui. (2014) Harmonic mechanical excitations of steady convective instabilities: A means to get more uniform heat transfers in mixed convection flows?. International Journal of Heat and Mass Transfer 77, pages 419-438.
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Po Ting Lin, Yogesh Jaluria & Hae Chang Gea. (2009) Parametric Modeling and Optimization of Chemical Vapor Deposition Process. Journal of Manufacturing Science and Engineering 131:1.
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Xavier Nicolas, Abderrahmane Benzaoui & Shihe Xin. (2008) Numerical simulation of thermoconvective flows and more uniform depositions in a cold wall rectangular APCVD reactor. Journal of Crystal Growth 310:1, pages 174-186.
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Yogesh Jaluria. (2003) Thermal Processing of Materials: From Basic Research to Engineering. Journal of Heat Transfer 125:6, pages 957-979.
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Qinghua Wang, Hoseon Yoo & Yogesh Jaluria. (2003) Convection in a horizontal rectangular duct under constant and variable property formulations. International Journal of Heat and Mass Transfer 46:2, pages 297-310.
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Wilson K. S. Chiu, Yogesh Jaluria & Nick G. Glumac. (2002) Control of Thin Film Growth in Chemical Vapor Deposition Manufacturing Systems: A Feasibility Study. Journal of Manufacturing Science and Engineering 124:3, pages 715-724.
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R.J. Goldstein, E.R.G. Eckert, W.E. Ibele, S.V. Patankar, T.W. Simon, T.H. Kuehn, P.J. Strykowski, K.K. Tamma, A. Bar-Cohen, J.V.R. Heberlein, J.H. Davidson, J. Bischof, F.A. Kulacki, U. Kortshagen & S. Garrick. (2002) Heat transfer – a review of 2000 literature. International Journal of Heat and Mass Transfer 45:14, pages 2853-2957.
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Yogesh Jaluria. (2001) Fluid Flow Phenomena in Materials Processing—The 2000 Freeman Scholar Lecture. Journal of Fluids Engineering 123:2, pages 173-210.
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Wilson K. S. Chiu, Cristy J. Richards & Yogesh Jaluria. (2001) Experimental and Numerical Study of Conjugate Heat Transfer in a Horizontal Channel Heated From Below. Journal of Heat Transfer 123:4, pages 688-697.
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