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Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 53, 2007 - Issue 8
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Original Articles

Investigation of Thermal Analysis on the Process of Laser-Assisted Nanoimprinting Lithography

Chun-Ping Jen Department of Mechanical Engineering, National Chung Cheng University, Chia-Yi, Taiwan, Republic of ChinaCorrespondence[email protected]
,
Hui-Ting Yang Nuclear Engineering Division, Institute of Nuclear Energy Research, Taoyuan County, Taiwan, Republic of China
&
Shao-Wen Chen Associate Engineer, Micro System Technology Center, Industrial Technology Research Institute, Tainan, Taiwan, Republic of China
Pages 807-820 | Received 07 Aug 2006, Accepted 30 Mar 2007, Published online: 14 Dec 2007

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Read on this site (1)

Tien-Mo Shih, Martinus Arie & Derrick Ko. (2011) Literature Survey of Numerical Heat Transfer (2000–2009): Part II. Numerical Heat Transfer, Part A: Applications 60:11-12, pages 883-1096.
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Articles from other publishers (1)

Jaideep Dutta. (2023) Revised mathematical model for assessment of thermal characteristics developed in ultrafast pulse laser assisted nanoimprinting lithography on silicon based substrate surface. Optical and Quantum Electronics 56:1.
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